User's Manual

TES-63 Source
User manual – version 06/2021
Page 28/46
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b) Stabilization dialogue box
Type in the desired target current level, and the maximum deviation between the actual value and the
desired value in %.
Please note that the operating pressure and applied high voltage levels should be chosen such that it
is possible to attain the desired current level by the regulation of the UHF power within its applicable
range. If the value of the UHF power should go above 6W, the regulation will stop automatically but
all other parameters will keep the same.
To activate the current stabilization, click on the "OFF" button. The button will become green and will
read "ACTIVE". (Any UHF power adaptions will be visible in the grey UHF power reading box in the
manual mode dialogue box.)
To deactivate the current stabilization, click on the "ACTIVE" button. The button will return to its
original grey state, reading “OFF”, and the program will continue to apply the UHF power level applied
at the moment of deactivation.
It is possible to set the value of the power step in Watt used during regulation
6.6 Limit values
parameter
Typical
Min Max
pressure
3e-6 mbar
3e-5 mbar minimum for ignition,
3e-6 mbar for source operation.
5e-4 mbar maximum for high voltage
insulation
Gas valve setpoint for 0.35mm
extraction
1.75 V
1.7 – 2 V
UHF power
5 W
5W continuous to avoid overheating
of the ion source