User's Manual

TES-63 Source
User manual – version 06/2021
Page 14/46
Polygon Physics SAS au capital social de 72 000 euros - 19, rue de Sassenage - 38600 Fontaine
SIREN 799 584 453 RCS Grenoble - TVA intracommunautaire FR 19 799584453 - APE 2899B
a) Source gas feedthrough
DN16 iso KF for mounting the gas valve.
b) Connector for the gas valve
Female D-Sub 15 connector to connect to control rack, to control the gas valve controller. Use the
provided D-Sub 15 male / DIN5 cable.
c) UHF power feedthrough
SMA feedthrough suitable for 2.45 GHz, to transfer the UHF power from the control rack to the source
flange. Use the provided SMA extension cable.
CAUTION
Never operate the rack without the SMA extension cable connected between the rack
and the source flange (it could damage the UHF power generator).
d) "HV beam" electrical feedthrough
CF16 flange with coaxial high voltage feedthrough to transfer the high voltage from the control rack to
the source body.
WARNING
NEVER DISCONNECT THE HIGH VOLTAGE CABLES WHEN THE CONTROL RACK IS
OPERATING.
e) "HV focus" electrical feedthrough
CF16 flange with coaxial high voltage feedthrough to transfer the high voltage from the control rack to
the focus electrode of the source.
WARNING
NEVER DISCONNECT THE HIGH VOLTAGE CABLES WHEN THE CONTROL RACK IS
OPERATING.