User's Manual

TES-63 Source
User manual – version 06/2021
Page 10/46
Polygon Physics SAS au capital social de 72 000 euros - 19, rue de Sassenage - 38600 Fontaine
SIREN 799 584 453 RCS Grenoble - TVA intracommunautaire FR 19 799584453 - APE 2899B
c) Gas valve
The Pfeiffer EVR 116 gas valve regulates the amount of gas entering the source.
d) SMA extension cable (2)
2.45GHz SMA cable Male/Male to transfer the UHF power from the rack to the source flange.
e) Power cord (3)
CE22 standard power cord to connect the rack to the grid.
f) Gas valve cable (4)
D-Sub 15 Male / DIN 5 cable to connect the gas valve with the control rack.