Datasheet
SR-DSV10739− 25-20 −
MINAS-A5 Vol.1 Motor Business Unit, Appliances Company, Panasonic Corporation.
9. Compliance with SEMI F47 Instantaneous Stop Standard
This function corresponds to the F47 power supply instantaneous stop standard in the SEMI standard
during no/ light load condition.
Useful when used in the semiconductor manufacturing equipment.
Warning:
[1] Not applicable to the amplifier which has a single phase 100V specification and a 24VDC specification for
control power input.
[2] Make sure to evaluate and confirm the compliance with F47 power supply instantaneous stop standard with
an actual device.










