Datasheet

SX-ZSV00007 - 20 -
Motor Business Division, Appliances Company, Panasonic Corporation
9. Compliance with SEMI F47 Instantaneous Stop Standard
 This function corresponds to the F47 power supply instantaneous stop standard in the SEMI standard
during no/ light load condition.
 Useful when used in the semiconductor manufacturing equipment.
Warning:
Make sure to evaluate and confirm the compliance with F47 power supply instantaneous stop standard
with an actual device.