Datasheet

FIBER
SENSORS
LASER
SENSORS
PHOTOELECTRIC
SENSORS
MICRO
PHOTOELECTRIC
SENSORS
AREA
SENSORS
SAFETY
COMPONENTS
PRESSURE
SENSORS
INDUCTIVE
PROXIMITY
SENSORS
PARTICULAR
USE SENSORS
SENSOR
OPTIONS
WIRE-SAVING
SYSTEMS
MEASUREMENT
SENSORS
STATIC CONTROL
DEVICES
LASER
MARKERS
PARTICULAR
USE SENSORS
EX-F70 /
EX-F60
Selection
Guide
HD-T1
M-DW1
Wafer
Detection
EX-F1
LX-100
FZ-10
NA1-11
Metal-sheet
Double-feed Detection
GD
Other
Products
Liquid Leak
Detection
Liquid Level
Detection
Color Mark
Detection
Small / Slim
Object Detection
EX-F70 /
EX-F60
Liquid Leak
Detection
737
Related Information
Liquid
Sensor body
Leakage panLeakage pan
Leak Detection Sensor
Amplier Built-in
EX-F70 SERIES EX-F60 SERIES
General terms and conditions .......................P.1
General precautions ..................................P.986~
High-speed detection even a little liquid leak
Reliable detection
The unique eect of
capillarity enables reliable
detection of small leaks
and viscous liquids.
EX-F70 SERIES
No need for sensitivity adjustment
No need for sensitivity adjustment with adjuster, so initial
mounting is easy.
Easy operation check
Safe design
If the sensor is not mounted correctly, if the cable is cut or
disconnected, or if the sensor is not operating correctly, the
output is the same as when the beam is not received (LEAK).
Design deals with human errors such as, forgetting to
mount, etc.
This sensor is equipped with a NORMAL indicator (green)
which lights up when mounting correctly, and a FAULT
indicator (red) which lights up when sensing the leaked liquid
or when mounted incorrectly (forgetting to mount exclusive
mounting bracket). So, the operation can be checked easily.
PVC mounting bracket available
A mounting bracket made of PVC (polyvinyl chloride) is
available. This type of mounting bracket can be utilized
without problems within environments that would corrode
normal metal brackets.
Easy installation & reset
Facilitates easy installation: the SUS mounting bracket
type can be installed using only a single screw and the
PVC mounting bracket type can be installed using only
two screws or an adhesive. No component replacement
required for resetting after leak detection. The simple
shape makes it easy to wipe o the leaked liquid.
Capillarity eect
New type of detection method
When a leak occurs, the beam from the beam-emitting part scatters
through the leaked liquid and is not transmitted to the beam-receiving part.
<When leakage occurs>
<When there is no leakage>
Beam-emitting part Beam-receiving part
Leakage pan
Leaked
liquid
Sensing
surface
Beam-emitting part Beam-receiving part
Leakage pan
Sensing
surface
The beam from the beam-emitting part
scatters through the leaked liquid and is
not transmitted to the beam-receiving part.
The beam from the beam-emitting part
reflects off of the surface of the sensor and
is transmitted to the beam-receiving part.
Compact, space-saving
This slim (10 mm 0.394 in)
side-mounting sensor is
especially good for use
in conned spaces.
SUS mounting bracket type
EX-F71
PVC mounting bracket type
EX-F72
10 mm
0.394 in
approx.
EX-F72□
Conforming to
EMC Directive
UL Recognition
Sensor selection guide ..............P.11~ / P.727~
UL 61010C-1 compatible, Passed the UL 991
Environment Test based on SEMI S2-0200.
[Category applicable for semiconductor
manufacturing: TWW2, Process Equipment]
[Applicable standards: UL 61010C-1]
[Additional test / evaluation standards as per intended
use: UL 991, SEMI S2-0200]
*
* Passed the UL 991 Environment Test
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Summary of content (8 pages)