Instruction Manual
8
Particle 
Trend Display
Particle 
Numeric Display
A high-performance fan for external air suction enables constant measuring over long periods. Semiconductor 
lasers and high-sensitivity optical design in the sensing section enable measurement of 0.3-µm particles.
Air Particle Sensor for In-line Measurement 
Particle Trend Indicator
The sensing section has a particle trend display for 
quick visual confirmation of the degree of cleanliness.
The Amplifier provides numeric indication of the 
number of 0.3-, 0.5-, and 1.0-µm particles.
A signal can be output at any level of particles if a 
threshold has been set. 
Smallest in the Industry
Measurement Principle
A semiconductor laser beam is targeted on to the air intake 
and the light is scattered when particles pass through that 
beam. The scattered light is received by the light receiving 
element and converted to an electrical signal.
Airflow
Laser beam
Small Size, Continuous Measurement
In-line Air Particle Sensor
Small Size, Continuous Measurement
In-line Air Particle Sensor










