Instruction Manual

3
Total Sensing for Clean Booths
Clean-monitoring of
Inspection and Measurement
Environments
OMRON provides the optimum clean environment with constant
monitoring of continuously changing production environments. Sensing
and control with up to 9 Air Clean Units. The degree of cleanliness in
each production stage can be controlled in relation to quality.
Continuous Sensing of Particles
The particle volume inside booths is constantly sensed by an Air
Particle Sensor. Optimum clean environments are maintained by
controlling air volume based on particle volume — from rapid
ventilation to energy-conserving gradational air volume control.
Ionized Clean Environments
An Ionizer is needed to remove dust
attached to particles by static electricity.
OMRON provides a new style for
discharging and dust removal, with the
first Ionizers in the industry that can be
combined with Air Clean Units.
Multi-point data management
No. of connectable Sensors: 10 max.
Note: Use Calculating Unit ZX-CAL2 when
connecting multiple amplifier units.
Electrostatic
Sensor
Air volume
Particle volume
Air volume
Particle volume
Cleanliness
threshold
Cleanliness
threshold
Rapid Feedback
The maximum and minimum air volume and
feedback time can be set to any desired
values. Once a cleanliness threshold has
been exceeded, the level of cleanliness can
be increased in a short time by applying the
maximum air volume.
Constant Feedback
Constant feedback is provided so that the
cleanliness threshold is not exceeded.
A constant level of cleanliness is always
maintained and energy is conserved.
Clean environments change during the production process due to the various work operations
performed.