Datasheet

D6T MEMS Thermal Sensors
High Precision
World's highest-class stable temperature output*
*According to OMRON's research as of February 2021, except for D6T-32L-01A.
Past
problem
Output was unstable in
applications requiring high
precision
Stable temperature
output
Solution
!
Achieves the world's highest level*
2
of SNR*
1
by combining the in-house designed and
manufactured ASIC and MEMS
-High Precision- Why?
Product Structure
Detect wavelengths in the range 8-12 μm
Infrared ray
Silicon lens
far-infrared focusing
MEMS thermopile
Electromotive force occurrence
ASIC
Low noise amplifier
MCU
A/D conversion,
calculation, I2C and I/F
OMRON's unique MEMS technology allows combining thermopile elements and ASICs into one package, resulting in
ultra-compact footprint and high precision.
The sensor utilizes the seebeck effect in which
thermoelectric force is generated due to the temperature
difference that occurs across the junction points of two
different types of metal.
Hot junction
Infrared ray (IR)Cold junction Cold junction
Si
Note 1. According to OMRON's evaluation method (30-second continuous measurement with a blackbody furnace at 25°C)
Note 2. However, product specifications are not guaranteed.
1
OMRON designs and manufactures both ASIC and MEMS thermopiles in-house.
OMRON's unique digital filter and process optimization reduce the noise of
ASIC, achieving the world's highest-level SNR.
*1 SNR: Signal-to-Noise Ratio. Compares the level of a signal to the level of background noise.
*2 According to OMRON's research as of February 2021, except for D6T-32L-01A.
MEMS thermopile detection principle
In-house
manufactured
ASIC
In-house
manufactured
MEMS
22.0
23.0
24.0
25.0
26.0
27.0
28.0
0 5 10 15 20 25 30
Time [s]
Sensor Output Temperature [°C]
OMRON D6T-1A-01
Standard Equivalent Product
22.0
23.0
24.0
25.0
26.0
27.0
28.0
0 5 10 15 20 25 30
Time [s]
Sensor Output Temperature [°C]
Stable output
Output
fluctuation
4
5