User Manual

K7L-AT50@/AT50D@@
3
Multi-channel Applications
Isolation between the power supply circuits and sensing circuits
allows multiple channels to be installed in the same location.
Sensing Band with Excellent Chemical
Resistance
SUS316 and polyethylene are used for the Sensing Band's core and
sheath to ensure high resistance to both acidic and alkaline liquids.
Liquid Leakage Detection for Measuring
Baths in CMP Devices
Liquid leaked to drain pans can be detected to prevent damage to
devices and cleaning irregularities for wafers.
Detection of Condensation and Liquid
Leakage at Semiconductor Production
Installations
Detection is also possible for condensation inside cleaning devices
and liquid leaked to the surroundings.
Detection of Liquid Leakage at Pipe Joints
for Liquid Chemical Tanks
Liquid leakage at a pipe joint can be detected by wrapping the
Sensing Band around the joint.
Detection of Cleaning Fluid Level for Plating
Devices
The level of pure water is detected inside plating baths. High
sensitivity allows high-accuracy control to prevent cleaning
irregularities.
Note: Be sure to ground the baths if two or more K7L Sensors are
used in the same tank in an explosion-prevention area.
Model Number Legend
K7L-AT50 @ @
(1) (2)
(1) (2)
Symbol Meaning
Output
Symbol Meaning
NPN
connection
PNP
connection
(Equivalent)
Blank No sensor disconnection detection OK OK Blank Ivory, Screw Terminal Socket
D Sensor disconnection detection OK NG B Black, Push-In Plus Terminal Socket
DP
Sensor disconnection detection
Supports plus common connection
NG OK
Note: If you want a Push-In Plus Terminal Socket, use
the K7L-AT50@B.
(The terminal arrangement of a Push-In Plus
Terminal Socket is upside down in comparison
with a Screw Terminal Socket.)