Datasheet

K7L-AT50@/AT50D@

Multi-channel Applications

Isolation between the power supply circuits and sensing circuits

allows multiple channels to be installed in the same location.

Sensing Band with Excellent Chemical

Resistance

SUS316 and polyethylene are used for the Sensing Band's core and

sheath to ensure high resistance to both acidic and alkaline liquids.

Liquid Leakage Detection for Measuring

Baths in CMP Devices

Liquid leaked to drain pans can be detected to prevent damage to

devices and cleaning irregularities for wafers.

Detection of Condensation and Liquid

Leakage at Semiconductor Production

Installations

Detection is also possible for condensation inside cleaning devices

and liquid leaked to the surroundings.

Detection of Liquid Leakage at Pipe Joints

for Liquid Chemical Tanks

Liquid leakage at a pipe joint can be detected by wrapping the

Sensing Band around the joint.

Detection of Cleaning Fluid Level for Plating

Devices

The level of pure water is detected inside plating baths. High

sensitivity allows high-accuracy control to prevent cleaning

irregularities.

Note: Be sure to ground the baths if two or more K7L Sensors are

used in the same tank in an explosion-prevention area.

Model Number Legend

Note: If you want a Push-In Plus Terminal Socket, use the K7L-AT50@B.

(The terminal arrangement of a Push-In Plus Terminal Socket is upside down

in comparison with a Screw Terminal Socket.)

K7L-AT50 @ @

(1) (2)

Symbol Meaning Symbol Meaning

Blank No sensor disconnection detection Blank Ivory, Screw Terminal Socket

D Sensor disconnection detection B Black, Push-In Plus Terminal Socket