Datasheet

9
Liquid Level Photomicrosensors
Classified According to Product Model
Photomicrosensors to Detect Wafer-carrier Mounting
Classified According to Product Model
Pushbutton Type
Appearance
Outer diameter of
mounting pipe
Optical modulation Features
Output
configuration
Model Page
EE-SPX613
6 to 13 mm dia.,
thickness: 1 mm
Transparent pipe
Modulated light
•Easy
mounting
• Equipped with
sensitivity
selector
Dark-ON/
Light-ON
(selectable)
EE-SPX613 107
Appearance Sensing distance
Sensing
method
Features
Output
configuration
Model Page
EE-SPY801/802
Reflective
(modulated
light)
Wafer-carrier
mounting
detection
Turns ON
when wafer
carrier is
present
EE-SPY80@ 111
Appearance Sensing method Features
Output
configuration
Model
Page
NPN output PNP output
EE-SA701/801
Pushbutton
Long service life
(5 million
operations) with
combination of
mechanical and
optical sensors
ON with no load
EE-SA801A
EE-SA801A-R
EE-SA801R
EE-SA801R-R
115
OFF with no
load
EE-SA701-R EE-SA701P-R
Note: The table includes only basic specifications. Be sure to check the detailed specifications and precautions on the page given in the right column before using the
Photomicrosensor.
Infrared light
17.2
26
16
0 to 3 mm
(wafer carrier)