Datasheet

15
1-5. Sensing LCD Casette Vertical Position
1-6. Checking Wafer Casettes
1-7. Detecting Fluid
Application
Water contained within a tank is pressurized to create water vapor. Liquid water rises in a FEP tube for water level monitoring.
EE-SPX613 Sensors are used to detect the water levels.
LCD substrate
EE-SPX304
25 cm
EE-SPY311
EE-SPX613 Sensor
Water
FEP Pipe