Datasheet

EE-SPY801/802
113
Standard Usage
This sensor is designed to detect wafer-carrier mountings. The
bottom of the wafer carrier has a ribbed construction for the leg
section, as shown in the following diagram. The EE-SPY801/802
detects the wafer-carrier mounting using a reflective optical sensor
that detects the leg section of the wafer-carrier.
Install a Sensor (or Pedestal) at each of the four corners indicated by
a circle in the following diagram.
Safety Precautions
Refer to Warranty and Limitations of Liability.
This product is not designed or rated for ensuring
safety of persons either directly or indirectly.
Do not use it for such purposes.
Make sure that this product is used within the rated ambient
environment conditions.
● Wiring
When extending the cable, use an extension cable with conductors
having a total cross-section area of 0.15 mm
2
(AWG26 equivalent).
The total cable length must be 5 m maximum.
To use a cable length longer than 5 m, attach a capacitor with a
capacitance of approximately 10 μF to the wires as shown below. The
distance between the terminal and the capacitor must be within 5 m.
● Mounting
Mount the Photomicrosensors securely on a flat surface, and tighten
the mounting screws using a tightening force of 0.30 N·m max. (Using
a spring washer is recommended to prevent the screws from
becoming loose.)
● Adjustment
The EE-SPY801/802 requires 10 ms to be in stable operation after
power is supplied.
If separate power supplies are used for the EE-SPY801/802 and load,
be sure to supply power to the EE-SPY801/802 before supplying
power to the load.
● Operating Environment
Do not use the EE-SPY801/802 in locations subject to salty air or
corrosive gases, such as hydrogen chloride gas.
Sensor
Wafer carrier leg section
Wafer carrier side view
(details omitted)
(Side view)
Sensor
A and C EE-SPY801 or EE9-C01
B and D EE-SPY802 or EE9-C02
Wafer carrier side view
(details omitted)
(Top view)
AD
BC
WARNING
Precautions for Correct Use