Datasheet

111
Wafer-carrier Mounting Photomicrosensors
EE-SPY801/802
Photomicrosensors for detecting
wafer-carrier mounting.
• The mounting position is set with a pedestal.
• The contact surface with the wafer carrier uses a special chemical-resistant
fluororesin.
• The unique optical system enables stable detection of almost all wafer-carriers.
• Light modulation effectively reduces external light interference.
• Utilizes talc-free clean cables.
Be sure to read Safety Precautions on
page 113.
Ordering Information
Sensors
Accessories (Order Separately)
Note: There are no sensor functions provided.
Appearance
Sensing
method
Sensing
distance
Output configuration Cable length Model
Reflective type
Turns ON when wafer carrier is
present.
2 m
EE-SPY801 2M
EE-SPY802 2M
Infrared li
g
ht
0 to 3 mm
Item Model
Pedestal
EE9-C01
EE9-C02