Datasheet
9
D6F-A1 MEMS Flow Sensor
Characteristics/Performance
Note: 1. Volumetric flow rate at 0°C, 101.3 kPa.
Note: 2. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Note: 3. Reference (typical)
Note: 4. With no condensation or icing.
Dimensions (Unit: mm)
Model D6F-01A1-110 D6F-02A1-110
Flow Range (See note 1.) 0 to 1 L/min 0 to 2 L/min.
Calibration Gas (See note 2.) Air
Flow Port Type
Bamboo joint
Maximum outside diameter: 8.6 mm, Minimum outside diameter: 7.4 mm
Electrical Connection Three-pin connector
Power Supply 10.8 to 26.4 VDC
Current Consumption 15 mA max with no load, with a Vcc of 12 to 24 VDC, and at 25°C
Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 kΩ)
Accuracy ±3% FS (25°C characteristic)
Repeatability (See note 3.) ±0.3% FS
Output Voltage (Max.) 5.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.) 0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage 26.4 VDC
Rated Output Voltage 6 VDC
Case PPS
Degree of Protection IEC IP40 (Excluding tubing sections.)
Withstand Pressure 200 kPa
Pressure Drop (See note 3.) 0.42 kPa 1.06 kPa
Operating Temperature (See note 4.) −10 to 60°C
Operating Humidity (See note 4.) 35% to 85%
Storage Temperature (See note 4.) −40 to 80°C
Storage Humidity (See note 4.) 35% to 85%
Temperature Characteristics ±3% FS for 25°C characteristic at an ambient temperature of −10 to 60°C
Insulation Resistance Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight 12.8 g
3.5-dia. through hole
Through hole
7.4 dia.
(3.7)
(7.45)
4
(6)
9.54.5
R1.75
R4.25
3.5
20
28
±0.1
20
6.5
4.5
0.5
4
66
41
30
±0.1
8
R4
8.6 dia.
15.1
30
±0.05
28
±0.05
Two, M3 screws
1. Vcc
2. Vout
Brown wire
Black wire
100
±15
200
±35
Blue wire
3. GND
Connector :51021 (Manufactured by Molex, LLC)
Terminal :50079 (Manufactured by Molex, LLC)
Wire :0.14SQ
D6F-01A1-110
D6F-02A1-110
Mounting Hole Dimensions
Cable (included): D6F-CABLE1