Datasheet

Items Model
Applicable gas
Air
Shape
Flow rate range
(L/mim)
Page
List of D6F series
MEMS Flow Sensor
D6F-P0001A1
D6F-01A1-110
D6F-P0010A

D6F-P0010AM2
D6F-02A1-110 D6F-03A3-000
5
4
3
2
1
0
25 8 128, 25
0
〜
3L/min
0
〜
2L/min
0
〜
0.1L/min 0
〜
1L /min
Items Model
Applicable gas
Natural gas (13A)LP gasNatural gas (13A)
Shape
Flow rate range
(L/mim)
Page
D6F-01N2-000
D6F-02L2-000
D6F-02L7-000
D6F-05N2-000
D6F-05N7-000
5
4
3
2
1
0
10 10, 18 10, 16, 18
0
〜
5L/min
0
〜
2L/min
0
〜
1L /min
Items Model
Applicable gas Air
Shape
Flow rate range
(L/mim)
Page
D6F-30A7-000
D6F-30AB71-000
70
60
50
40
30
20
10
0
14, 16, 18, 20 14, 16, 20 18, 23 20, 23
0
〜
70L/min
0
〜
30L/min
0
〜
10L /min
0
〜
20L/min
14, 16, 20
0
〜
50L/min
Gas Minute to middle flow
Analog
Air Minute flow Analog
Air Middle to high flow Analog Digital
Digital type only
D6F-10A5-000
D6F-10A6-000
D6F-10A7-000
D6F-10A7D-000
D6F-20A5-000
D6F-20A6-000
D6F-20A7D-000
D6F-50A5-000
D6F-50A6-000
D6F-50A7D-000
D6F-70AB71-000
D6F-70AB71D-000
6