Datasheet

31
D6F-W
MEMS Flow Sensor
A Compact Sensor That Uses
OMRON’s Unique Flow Path Structure for
High-performance Flow Rate Measurement.
• Anti-dust performance enhanced by OMRON’s unique three-dimensional
flow path structure.
• High accuracy of ±5% FS.
Ordering Information
MEMS Flow Sensor
Accessory (Sold separately)
Note: Refer to Accessories for the D6F Series on page 39.
Connections
Output Voltage Characteristics
D6F-W01A1
D6F-W04A1
The flow velocity is the value calculated from the mass flow rate in OMRON’s specified
48-mm-dia. wind tunnel. It does not indicate the flow velocity determined by the Mea-
surement Law of Japan. The wind tunnel conditions are shown in
Figure 1 , below.
Measurement conditions: Power supply voltage of 12 VDC, ambient tempera-
ture of 25°C, and ambient humidity of 35% to 75%.
D6F-W10A1
The flow velocity is the value calculated from the mass flow rate in OMRON’s specified
155-mm-dia. wind tunnel. It does not indicate the flow velocity determined by the Mea-
surement Law of Japan. The wind tunnel conditions are shown in
Figure 2 , below.
Measurement conditions: Power supply voltage of 12 VDC and ambient temper-
ature of 25°C
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Applicable fluid Flow rate range Model
Air
0 to 1 m/s D6F-W01A1
0 to 4 m/s D6F-W04A1
0 to 10 m/s D6F-W10A1
Type Model
Cable
D6F-W CABLE
D6F-W CABLE-L
Enlarged View
2. Vout.
3. GND.
1. Vcc.
Pin No. 1: Vcc
2: Vout
3: GND
Connector S3B-ZR-SM2-TF
(made by J.S.T. Mfg. Co.)
D6F-W01A1
D6F-W04A1
D6F-W10A1
Use the following connectors from
J.S.T. Mfg. Co. Ltd. to connect the D6F:
Housing: ZHR-3
Contacts: SZH-002T-P0.5
Wires: AWG28 to AWG26
Or
Contacts: SZH-003T-P0.5
Wires: AWG32 to AWG28
Flow velocity
m/s
0 0.25 0.50 0.75 1.00
Output voltage V 1.00±0.2 1.35±0.2 2.01±0.2 3.27±0.2 5.00±0.2
Flow velocity
m/s
0 1.0 2.0 3.0 4.0
Output voltage V 1.00±0.2 1.58±0.2 2.88±0.2 4.11±0.2 5.00±0.2
Flow velocity
m/s
0 2.0 4.0 6.0 8.0 10.0
Output voltage V 1.00 ± 0.24 1.94 ± 0.24 3.23 ± 0.24 4.25 ± 0.24 4.73 ± 0.24 5.00 ± 0.24
6.0
5.0
4.0
3.0
2.0
1.0
0.250.00 1.000.750.50
0.0
Output voltage (V)
Flow velocity (m/s)
1.00.0 4.03.02.0
6.0
5.0
4.0
3.0
2.0
1.0
0.0
Output voltage (V)
Flow velocity (m/s)
6.0
5.0
4.0
3.0
2.0
1.0
0.0
0246810
Output voltage (V)
Flow velocity (m/s)
D6F-W01A1 D6F-W04A1
D6F-W10A1
48 dia.
60 20.8
Air volume sensor
Flow velocity measurement
position
Figure 1: Wind Tunnel
100
10
18
155 dia.
Honeycomb flow grate
Air volume sensor
Flow velocity measurement position
Figure 2: Wind Tunnel