Datasheet

Cross-sectional view of flow sensor chip
Principles of MEMS Flow Sensor Measurement
D6F Series
Highly Resistant to Dust
Built-in Dust Segregation System (cyclonic) D6F-W/-V/-P
Airflow
External flow
Downwind
Upwind Flow of gas
Centrifugal
separation
chambers
Dust vent
MEMS sensor
element
= leads the flow
of clean air in
here
Pattent
No.4534526
Energy
saving
±3RD (25-100%F.S.) is realized by
linear temperature correction using
ASIC technology
High
Accura cy
Omron’s unique MEMS
technology allows
detection of very low
air velocities
High
Sensit ivi ty
The product size is reduced by using the
world-smallest class size MEMS sensor element
Compac t
The sensor can be placed anywhere
thanks to its dust-resistant structure.
Omron’s unique design of 3D flow path
provides a high level of reliability by
separating dust particles to reduce its
effect on the sensor chip. Additionally,
Omron succeeded in reducing the
sensor size, allowing it to be used in
wider range of applications.
By detecting this temperature difference appearing as a
difference in the electromotive forces developed by the
thermopiles, it allows the mass flow rate and mass flow
velocity to be measured without the influence of
temperature and pressure. Since the thermopile generates
the thermo-electromotive force, the power consumption is
much lower than when using the resistivity method.
Flow rate of 1L: Output corresponding to flow rate change below 1/1000 of full scale.
Ambient temperature = 25degC (Model: D6F-20A7D-000-0)
Dimension of D6F-V model: 24x8x14mm.
Magnified
view
Model : D6F-W
Output voltage (V)
Flow rate(SLM)
-0.2 0.0 0.2 0.4 0.6 0.8 1.0
6
5
4
3
2
1
0
1.0 4
1.0 2
1.0 0
0.98
0.96
Output voltage (V)
Flow rate (sccm)
-3.2 -1.6 0.0 1.6 3.2
Output voltage characteristic
1SLM=1000sccm
6%
4%
2%
0%
-2%
-4%
-6%
Error
Output voltage (V)
Standard lower limit
Standard upper limit
Flow rate (L/min)
04 812 16 20
Operating
characteristic
Realizing a highly accurate flow measurement, sensing even a single flap of a butterfly’s wings
3