Datasheet

D6F-PH MEMS Differential pressure Sensor

Characteristics/Performance

Note: 1. At standard atmospheric pressure (1013.25 hPa)

Note: 2. Dry gas must not contain large particles, e.g., dust, oil, or mist.

Note: 3. The zero point tolerance and span tolerance are independent uncertainties and add according to the principles of error propagation.

Note: 4. With no condensation or icing.

Note: 5. Type D6F-PH is based on thermal flow principle. Air flow is needed to measure the differential pressure.

Typical characteristic of air flow by differential pressure is below.

Relation between pressure and flow rate

Model D6F-PH0025AD1-@ D6F-PH0505AD3-@ D6F-PH5050AD3-@

Differential pressure range (See note 1) 0 to 250 Pa ±50 Pa ±500 Pa

Calibration Gas (See note 2.) Air

Port Type Bamboo joint, Maximum outside diameter: 4.9 mm, minimum outside diameter: 4.0 mm

Power Supply 2.3 to 3.6 VDC

Current Consumption 6 mA max. with no load and Vcc of 3.3 VDC, GND = 0 VDC, 25°C

Resolution 12 bit

Zero point tolerance (See note 3.) ±0.2 Pa

Span tolerance (See note 3.) ±3% RD

Span shift due to temperature variation < 0.5% RD per 10°C

Response time

33 ms typical at 12 bit resolution (50 ms max.)

The processing time is 6 ms typical at 12 bit resolution.

Gas flow through sensor (See note 5.) 63 mL/min 23 mL/min 100 mL/min

Interface I2C

Case material PPS

Degree of Protection IEC IP40 (Excluding tubing sections.)

Withstand Pressure 10 kPa

Operating temperature (See note 4.) -20 to +80°C

Operating humidity (See note 4.) 35 to 85 %RH

Storage temperature (See note 4.) -40 to +80°C

Storage humidity (See note 4.) 35 to 85 %RH

Insulation Resistance Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)

Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)

Weight 5.2 g

Differential pressure (Pa)

-20

-40

-60

Flow rate (mL/min)

-300 -100 100 300 500-500