Datasheet

28
D6F-PH
MEMS Differential pressure Sensor
A Compact, High-accuracy Differential
Pressure Sensor with Superior
Resistance to Environments.
• High accuracy of ±3% RD
• Linearized and temperature compensated
• Digital output (I2C communication)
• High flow impedance to reduce the influence of bypass configuration
• Lineup of 4 types of slave address models
Ordering Information
Output Characteristics
D6F-PH0025AD1-@
Measurement conditions: Power supply voltage of 3.3 ±0.1 VDC, ambient tem-
perature of 25±5°C, and ambient humidity of 35% to 75%.
Differential pressure conversion formula: Dp = (Op - 1024) / 60000 × 250
Dp = Differential pressure, Op = Output
D6F-PH0505AD3-@
Measurement conditions: Power supply voltage of 3.3 ±0.1 VDC, ambient tem-
perature of 25±5°C, and ambient humidity of 35% to 75%.
Differential pressure conversion formula: Dp = (Op - 1024) / 60000 × 100 - 50
Dp = Differential pressure, Op = Output
D6F-PH5050AD3-@
Measurement conditions: Power supply voltage of 3.3 ±0.1 VDC, ambient tem-
perature of 25±5°C, and ambient humidity of 35% to 75%.
Differential pressure conversion formula: Dp = (Op - 1024) / 60000 × 1000 - 500
Dp = Differential pressure, Op = Output
Note. Change of gas density affects the sensor output.
Change of atmospheric pressure is compensated by the following formula.
Dpeff = Dp × (Pstd / Pamb)
Dpeff: Effective differential pressure
Dp: Differential pressure of the sensor output
Pstd: Standard atmospheric pressure (1013.25 hPa)
Pamb: Actual ambient atmospheric pressure (hPa)
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Applicable fluid (See note 1.) Measurement range (See note 3.) slave address (7 bit) Model
Air (See note 2.)
0 to 250 Pa
0b110_1100, 0x6C D6F-PH0025AD1
0b110_1101, 0x6D D6F-PH0025AD1-1
0b110_1110, 0x6E D6F-PH0025AD1-2
0b110_1111, 0x6F D6F-PH0025AD1-3
-50 to 50 Pa
0b110_1100, 0x6C D6F-PH0505AD3
0b110_1101, 0x6D D6F-PH0505AD3-1
0b110_1110, 0x6E D6F-PH0505AD3-2
0b110_1111, 0x6F D6F-PH0505AD3-3
-500 to 500 Pa
0b110_1100, 0x6C D6F-PH5050AD3
0b110_1101, 0x6D D6F-PH5050AD3-1
0b110_1110, 0x6E D6F-PH5050AD3-2
0b110_1111, 0x6F D6F-PH5050AD3-3
Note: 1. The Sensor be calibrated for differ-
ent gas types. Consult your Omron
representative.
Note: 2. Dry gas must not contain large par-
ticles, e.g., dust, oil, or mist.
Note: 3. At standard atmospheric pressure
(1013.25 hPa)
Differential pressure (Pa) 0 50 100 150 200 250
Output
(HEX)
1024
(0400)
13024
(32E0)
25024
(61C0)
37024
(90A0)
49024
(BF80)
61024
(EE60)
Differential pressure (Pa)
70000
60000
50000
40000
30000
20000
10000
0
Output (count)
50 100 150 200 2500
Differential pressure (Pa) -50 -30 -10 0 10 30 50
Output
(HEX)
1024
(0400)
13024
(32E0)
25024
(61C0)
31024
(7930)
37024
(90A0)
49024
(BF80)
61024
(EE60)
Differential pressure (Pa)
70000
60000
50000
40000
30000
20000
10000
0
Output (count)
-30 -10 10 30 50-50
Differential pressure (Pa) -500 -300 -100 0 100 300 500
Output
(HEX)
1024
(0400)
13024
(32E0)
25024
(61C0)
31024
(7930)
37024
(90A0)
49024
(BF80)
61024
(EE60)
Differential pressure (Pa)
70000
60000
50000
40000
30000
20000
10000
0
Output (count)
-300 -100 100 300 500-500