Datasheet

Cross-sectional view of flow sensor chip
Thermopile A
Thermopile B
Heater
Temperature distribution
Principles of MEMS Flow
D6F Series
Mass Flow Measurement
No airflow
D6F-A6
D6F-W
Omron’s MEMS flow sensor accurately detects minute airflow so much as a single flap of a butterfly’s wings.
A gas flow sensor capable of “measuring mass flow” independent of temperature and pressure.
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of temperature and pressure.
pressure.
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During the absence of airflow, the temperature
distribution around the heater is symmetrical.
When there is airflow, the temperature of the
upwind side cools down and the temperature
of the downwind side warms up, disrupting the
symmetry of the temperature distribution.
Q1
There are two balloons; each having different volumes.
But these balloons have the same mass. Why is that?
The volume increases/decreases according to the pressure and
temperature changes. The mass, on the other hand,
remains constant regardless of the environmental changes.
The mass ow measurement allows measurement performance
that is not affected by the changes in the environment.
A
Q2 Why is mass ow measurement required?
A
An accurate measurement of the ow is required especially for
combustion control. Omron’s ow sensor enables measuring the
gas ow based on the mass ow measurement.
Realizing a highly accurate ow measurement,
2