FMA 3200/3200ST/3400/3400ST Series Thermal Mass Flow Controllers
READ THIS MANUAL COMPLETELY BEFORE ATTEMPTING TO CONNECT OR OPERATE YOUR FLOW SENSOR. FAILURE TO DO SO MAY RESULT IN INJURY TO YOU OR DAMAGE TO THE FLOW CONTROLLER. T A B L E A. O F C O N T E N T S Introduction ............................................................................................. 4 1. Unpacking ........................................................................................... 4 2. Product Overview And Principle Of Operation ..........................................
A. Introduction 1. Unpacking All units are suitably packaged to prevent damage during shipping. If external damage is noted upon receipt of the package, please contact Omega Engineering immediately. Open the package from the top, taking care not to cut too deeply into the package. Remove all the documentation and contents. Take care to remove all the items and check them against the packing slip. The products should also be checked for any concealed shipping damage.
sensor design. This proven design minimizes zero drift while maintaining fast response and linear outputs with virtually no maintenance. The FMA 3200/3400 Series utilizes thermal flow sensing technology. A portion of the gas flowing through the unit is redirected into a small sensor tube. This tube has two coils on the outside. The first coil introduces a small amount of heat into the gas stream. As the gas passes through the tube heat is transferred from one coil to the other.
unit may be damaged or fail prematurely. Such damage will not be repaired under warranty. Units should be installed in a clean, dry environment with an ambient temperature that is as stable as possible. Avoid areas with strong magnetic fields, strong air flows or excessive vibration. In order to operate the differential pressure across the controller should be in the range 15-45psid (1-3 bar). For optimum performance a differential pressure of 25psid is recommended.
2. Mounting the Flow Controller. The FMA 3200/3400 Series controllers have no particular orientation or installation requirements so may be mounted in any convenient position. It is recommended that units be fixed to a suitable substrate using the two 4-40 mounting holes provided. Mounting View from Bottom (mounting hardware not included with sensor) 3. Tubing Connections All tubing must be clean, dry and purged with clean dry air before installation of the FLO-CONTROLLER®.
4. Electrical Connections Caution: Incorrect wiring may cause severe damage to the unit. Applying an AC voltage (115VAC or 230VAC) directly to the unit will cause damage. Read the following instructions carefully before making any connections. a) Overview The FMA 3200/3400 Series provides a 0-5VDC analog output proportional to the flow rate. This output may be connected to a display, data acquisition system or voltmeter with an impedance of greater than 2.5 kΩ (kilo ohms).
b) Connecting The 6 Pin Mini Din Connector Using a suitable mating connector the pins of the integrated connector should be wired as follows: Connecting To The Integrated 6 Pin Connector Pin Out of Integrated Connector Pin 2 should be connected to the Positive of the power source. Pin 6 should be connected to the Negative (Ground) of the power source. Pin 3 provides the signal output and should be connected to the positive terminal of the display, data acquisition system or voltmeter.
c) Connecting The 6 Pin Mini Din Connector & FMA 3000C Cable The two mating connectors should be pushed together and the pigtail leads wired as follows: Connecting To The Integrated 6 Pin Connector Using A FMA 3000C Cable The RED wire should be connected to the Positive of the power source. The BLACK wire should be connected to the Negative (Ground) of the power source.
d) Connections For The 9 Pin D Sub Connector Using a suitable mating connector the pins of the integrated connector should be wired as follows: Connecting To The Integrated 9 Pin Connector Pin Out of Integrated Connector PIN 3 should be connected to the Positive of the power source. PIN 4 should be connected to the Negative ( Ground ) of the power source. PIN 2 provides the signal output and should be connected to the positive terminal of the display, data acquisition system or voltmeter.
e) Connections For The 15 D Sub Connector Using a suitable mating connector the pins of the integrated connector should be wired as follows: Connecting To The Integrated 15 Pin Connector Pin Out of Integrated Connector PIN 7 should be connected to the Positive of the power source. PIN 5 should be connected to the Negative ( Ground ) of the power source. PIN 2 provides the signal output and should be connected to the positive terminal of the display, data acquisition system or voltmeter.
f) Using a 0-5VDC Input / Output Power Adapter Package. An optional 0-5VDC Input / Output Power Adapter Package is available for use with the FMA 3200/3400 Series. This consists of a power source (115VAC or 230VAC), a connection hub and two cable assemblies with pigtail (soldered wire) ends. This should be assembled as shown in the following diagram.
C. Operation 1. Warm Up Before applying power to the unit check all tubing and electrical connections. Once correct installation is verified switch on the power. The unit should then be allowed to warm up for 5 minutes before gas pressure is applied. 2. Verification of Zero Flow through the unit should be stopped by sealing or capping the inlet of the controller. It is not adequate to only stop flow by turning off the gas supply or closing a valve as there may be a leak in the system.
Q1 / Q2 = K1 / K2 Q1 is the flow rate of the new gas Q2 is the flow rate of the original calibration gas K1 is the K factor of the new gas K2 is the K factor of the original calibration gas Q1 = (K1 / K2) Q2 If K2 is larger than K1 then linear results will only be achieved if the unit does not exceed 5(K1/ K2)VDC for the full scale output. Example 1 For a 0-200sccm unit calibrated for air the flow at 5.0VDC would be 200sccm. The K factor for air is 1. If the unit is used with Helium (K factor 1.
If a gas other than the calibration gas is used then the adjusted maximum (full scale) flow for the unit should be calculated using the K Factor for that gas (see section C3 above). A zero or negative set-point voltage will cause the solenoid valve to close fully. Whilst closed, the valve is configured to withstand pressures up to 60 psig (higher pressures on request). Caution: The flow controller valve will open if the pressure exceeds 60psig.
7. Zero Adjustments The zero should be checked as detailed in section C part 2. If an adjustment is needed the Zero Potentiometer should be carefully turned until the output (VDC) becomes zero. Caution: Do NOT adjust the Gain Potentiometer when adjusting the zero or the unit will need to be recalibrated. Making Zero Adjustments Using a Small Flathead Screwdriver Care should be taken to only make small adjustments to the zero potentiometer.
FMA 3400/3400ST Series Dip Switches Dip switch 4 is allocated to the primary calibration gas. Dip switch 5 is allocated to the second calibration gas (if applicable). Dip switch 6 is allocated to the third calibration gas (if applicable). To select the gas, the dip switch should be turned ON. All other switches allocated to gases (i.e. 4, 5 or 6 except the required switch/gas) should be set to OFF. D. Maintenance and Product Care 1.
E. Specifications Series Accuracy (including linearity) FMA 3200 FMA 3400 FMA 3200ST FMA 3400ST ±1.5% of Full Scale* ±1.5% of Full Scale* Second and third gases ±3.0% F.S.* ±1.5% of Full Scale* ±1.5% of Full Scale* Second and third gases ±3.0% F.S.* Repeatability Pressure Rating ±0.25% Full Scale* 150 psig (10.3 bar) 500 psig (34.5 bar) Pressure Sensitivity ±0.
F. Dimensions ALL DIMENSIONS IN INCHES (MILLIMETERS IN BRACKETS) FMA 3200/3200ST Series - 1/4” Stainless Fittings Shown M-4271/0707, pg.
FMA 3400/3400ST Series - 1/4” Stainless Fittings Shown M-4271/0707, pg.
G. Gas K Factors Gas Chemical Symbol K Factor Acetylene C2H2 0.589 Air - 1.000 Argon Ar 1.438 Butane C4H10 0.260 Carbon Dioxide CO2 0.739 Deuterium D2 1.000 Ethylene C2H4 0.598 Freon 11 CCL3F 0.330 Freon 12 CCL2F2 0.354 Freon 13 CCLF3 0.385 Freon 14 CF4 0.420 Freon 22 CHCLF2 0.460 Germane GeH4 0.570 Helium He 1.458 Hydrogen H2 1.011 Krypton Kr 1.440 Methane CH4 0.721 Neon Ne 1.443 Nitric Oxide NO 0.990 Nitrogen N2 1.000 Nitrous Oxide N2O 0.
H. Troubleshooting Guide Symptom Possible Cause Method of Correction Clicking noise from controller Unit in error mode Check there is sufficient pressure and that the flow path is not restricted or blocked No response Unit wired incorrectly Check wiring is according to Section B5 Loose connection Check all connectors and wiring Damaged connector pins Contact Omega Engineering Blocked flow path Check flow path for obstructions. Piping leak before sensor Check all piping and connections.
Symptom Possible Cause Method of Correction Inaccurate control Insufficient or varying power Check the power supply output and increase if necessary Insufficient pressure Ensure the pressure (an differential pressure) is high enough o operate the unit. Varying pressure Check the stability of the pressure regulation and improve if necessary.
. M-4271/0707, pg.
M-4271/0707, pg.
