User's Manual Plasma Monitoring & Control System PlasCalc-2000-UV-VIS-NIR Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 1
© Copyright 2004-2011 Ocean Optics Germany GmbH Thin Film Metrology Maybachstrasse 11 D- 73760 Ostfildern / Germany Tel.: +49 (0)711 34 16 96-0 Fax: +49 (0)711 34 16 96-85 E-Mail: thinfilm@oceanoptics.eu www.oceanoptics.
Contents 1 Safety Instructions ............................................................................................. 1 2 Unpacking Instructions ...................................................................................... 1 3 Introduction ........................................................................................................ 2 4 Installation .......................................................................................................... 3 4.1 Installation ........
1 Safety Instructions Instructions: All the safety and operating instructions should be read before the unit is operated. Before using the power supply for the first time check for transport damage. Warning: All warnings on the unit and in the operating instructions should be adhered to. Use this instrument in a clean laboratory environment. Moisture The unit is designed for operation in dry rooms only. Heat The unit should be situated away from radiators, hot bodies, ovens or other heat sources.
3 Introduction Ocean Optics PlasCalc Process control is essential in industrial plasma applications to ensure reliability and high quality of the process. For this purpose optical emission spectroscopy (OES) is an excellent tool since this technique does not affect the plasma and several plasma species can be monitored in real-time and in-situ. The Ocean Optics PlasCalc system is designed especially for industrial applications where a robust set-up and an easy-to-use software are required.
4 Installation 4.1 Installation Do not connect the system to the PC before PlasCalc Software has been installed. Insert the PlasCalc CD in your CD drive and launch the setup program. The setup program will lead you through the installation process. Please follow the instructions and fill in the necessary information. All program files and the Java Runtime Engine will be copied on the hard disk of your computer. Please make sure that enough free disk space (approx. 100 MByte) is available. 4.
5 Description With its high resolution miniature fiberoptic spectrometer equipped with a 2048 pixel CCD and fast acquisition electronics, the PlasCalc acquires plasma light emission from 200 to 1100 nm in 3 ms. The well engineered PlasCalc process control system brings the benefits of sophisticated algorithms for data acquisition and signal treatment. The analog-digital output and input capabilities gives together with full PC connectivity all options to control the process.
6 Functions of Panel controls 6.
6.2 Back Panel USB-Socket 12VDC Socket Type & Serialnumber Digital Outputs Digital Inputs (4x) Digital I/O Pinout Analog outputs The digital inputs and outputs are differential I/Os. Therefore you need to connect a signal and a ground wire to each input and each output.
7 Software 7.1 Installation Connect the system to the PC only after the software has been installed. 1. Close all applications running on the PC 2. Insert the software CD into the CD-ROM drive 3.
7.
Menu and Tool Bars This is the main window of the application which appears after starting the program. The menus and toolbars contain all commands available as it is common in Windows® applications. File List The file list is a summary of all open files with a listing of the tracks for each file. The check box in front of each track indicates whether a track is visible or hidden.
7.4 Menu 7.4.1 Commands File Menu New ... < Create one of the following configurations as new: New record New monitor Open ... Open a spectrum or an existing PlasCalc File (.pcf). Save Save the data of the active window in ASCII format. You will be asked which spectra or time tracks you want to save. Close Close the active window with all spectra and/or PlasCalc Files. Print... Print the active window. For the setting up the printer please refer to the options section in the printer set-up.
7.4.2 Edit Menu XY-Autoscale Set the display ranges of the wavelength/time and of the signal to the minimum and maximum data values of the selected file. This will display all data of the selected file. X-Autoscale Set the display range of the wavelength/time to the minimum and maximum data values of the selected file. The display range of the signal remains unaffected.
Delete line/integral Delete selected line or line integral. If this line or line integral was connected to a monitor track the corresponding monitor track will be deleted as well. Configure plot ... Open the dialog for setting up or changing the plot options.
7.4.3 Recording Menu New record Create a new record file. Start recording Start recording spectral data. Stop recording Stop recording spectral data. Suspend record display Suspend record display while recording data. Since updating the display consumes a lot of CPU time this option may be helpful for measurements in which time is critical. Configure recording Open the dialog for setting up and changing the recording options. Save current spectrum Save the current spectrum while recording.
Reference spectrum | Subtract reference spectrum Switch on/off automatic subtraction of reference spectrum while recording. Reference spectrum | Take current spectrum as reference spectrum Set current spectrum as reference spectrum. Reference spectrum | Open reference spectrum from file Load a reference spectrum from hard disk.
Dark spectrum | Open dark spectrum from file Load existing dark spectrum from disk Dark spectrum | Save dark spectrum to file Save the dark spectrum to disk. Dark spectrum | Clear dark spectrum Clear the background spectrum. All signal values are set to zero. 7.4.4 Monitoring Menu New monitor Create a new monitor file. Start monitoring Start monitoring. If the option Synchronize recording with monitoring is selected in the dialog Monitor Options recording spectra will start as well.
Auto pause monitor Pause monitoring automatically if monitor tracks are below given setpoint Add line/integral as monitor track Add selected line or line integral as monitor track. Add combined monitor track Add monitor track as a combination of two already existing monitor tracks. The tracks can be combined by basic arithmetical operations. Load monitor recipe Open and load recipe file with monitoring options from hard disk. Save monitor recipe Save current monitoring options to recipe file on hard disk.
7.4.6 Tools Menu Spectrometer | Select spectrometer Opens the dialog for selecting a spectrometer. In this dialog the Serialnumber of the PlasCalc system has to be selected Spectrometer | Configure spectrometer Opens a dialog to view and change calibration parameters of the spectrometer.
7.4.7 View Menu View | Zoom Switch on/off zooming. View | Line cursor Switch on/off line cursor. View | Horizontal scrollbar Switch on/off horizontal scroll bar. View | Vertical scrollbar Switch on/off vertical scroll bar. View | File list Display file list window.
7.4.8 Window Menu All windows are listed and can be selected. 7.4.9 Help Menu Help | PlasCalc Help Index The index of the help system of von Ocean Optics PlasCalc is displayed. Help | Ocean Optics Homepage Link to Ocean Optics Homepage. Please check for news and latest updates. Help | About Information about Ocean Optics PlasCalc is displayed.
7.5 Tool Bars In the tool bars the most important and often used menu commands are displayed as buttons. By pressing a button the corresponding menu command is carried out. 7.5.1 File Tool Bar Button Action Create a new record or monitor window Open an existing spectrum or PlasCalc File (.pcf) Save the data of the active window in ASCII format Close the active window with all spectra and/or PCF files Display the index of the help system Print the active window 7.5.
7.5.4 Tools Tool Bar Button Action Open current spectrum in SpecLine (available only if SpecLine is installed) 7.5.
7.5.6 Monitoring Tool Bar Button Action Create a new monitor file Start monitoring Pause monitoring Stop monitoring Open dialog for setting up and changing monitor options Switch on/off the fixing of monitor time scale at currently displayed minimum time Switch on/off automatic pausing of monitoring for low light intensity.
7.6 Dialogs 7.6.
7.6.
Trigger Mode Use external trigger External trigger mode.
Data Storage Save spectra Save spectra to consecutive files on hard disk according to given settings. The file name will be extended by ongoing numbers! Save data sequences Each recorded process data is stored in consecutive files or consecutive folders with ongoing numbers Prompt when overriding Prompt when overriding files at the file...
Reference Background Save reference spectra Save reference spectrum by default in specified file on hard disk Save background spectra Save background spectrum by default in specified file on hard disk General: Default values Ocean Optics Germany GmbH The current options are saved as default values PlasCalc 2000 Thin Film Metrology 27
7.6.3 Monitor Options Dialog for setting and changing options for monitoring with the following tab sheets: Monitoring Initial display values Initial display interval of time and intensity Display unit Unit of time scale Storage interval Time interval for which recorded data is stored in RAM memory. Please be aware of available memory! Normalize monitor tracks All monitor signals are scaled to the maximum intensity value Average over ...
Tracks (single track) Monitor tracks Selection list of monitor tracks Name Description of monitor track Line intensity Evaluate line intensity at given wavelength value Integral intensity Evaluate intensity of line integral between given wavelength values Background subtraction Subtract background using intensity value at given wavelength Multiplier Multiply recorded intensity with the given value Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 29
Tracks (combined track) Monitor tracks Selection list of monitor tracks Name Description of monitor track Monitor track Selection list of first monitor track to be combined Operation Selection list of basic arithmetical operations Monitor track Selection list of second monitor track to be combined Multiplier Multiply recorded intensity with the given value Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 30
Setpoints Upper set-point at Upper set-point at given intensity value Lower set-point at Lower set-point at given intensity value Recording of set-point crossing: Highlight in monitor A blinking symbol is shown on the track display at the specified track when a setpoint is crossed Show message in dialog box Show the below given text on the screen when a set-point of the track is crossed Acoustic signal Play the below given acoustic signal when a set-point of the track is crossed Ocean Optics German
Data storage Save data Save monitor data to file on hard disk according to given settings Save spectra Save spectra to file on hard disk according to given settings. The file name will be extended by ongoing numbers! Count data files Each recorded process data is stored in consecutive files with ongoing numbers Prompt when overriding Prompt when overriding files at the file... beginning of each recording sequence. These entries correspond to the setting in the dialog Record Options.
Options Allow real-time autoscaling Automatic autoscaling of the y-values while for y-values monitoring. The autoscaling can be switched on and off with the commands YAutoscale and Y-Autoscale single track. Synchronize recording with Synchronize Start/Stop of recording spectra monitoring with Start/Stop of monitoring Pause monitoring while average signal...
7.6.4 Control Options Actuator (analog output) Output channels Selection list of available output channels Monitor track Selection list of monitor tracks to be assigned to selected output channel Signal Signal values Voltage Voltage values to be assigned to signal values.
Actuator (digital output) Activate controlling Switch on/off controlling Output channels Selection list of available output channels Monitor track Selection list of monitor track to be assigned to selected output channel Active set-points List of active set-points with set-point values TTL levels: low.../high: normal TTL signaling high...
Control Output channels Selection list of available output channels Monitor track Selection list of monitor track to be assigned to selected output channel Active control loop Switch on/off controlling for selected channel Set-point / Voltage / Percentage Set-point value for controlling given signal counts / output voltage / percent of maximum signal Closed loop control (PID) Switch on/off PID control Enable voltage output of Switch on/off voltage output for selected channel output channel Ocean O
Options Activate controlling Switch on/off general controlling Hold signals of output The voltage of the analog outputs and the TTL channels after ...
PID Control Options Proportional term Kp parameter Integral term Ki and Ti parameter Derivative term Kd and Td parameter Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 38
7.6.
Tracks Display track Display track in diagram Line Line options of selected track: color, width and style same attributes for all lines Line options are applied to all tracks Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 40
Diagram Background Background color Axis Line options of axis: color, width and style Grid Line options of grid: color, width and style Horizontal grid lines Display horizontal grid lines Vertical grid lines Display vertical grid lines Tics Position and Length of unit tics Borders Border width of diagram Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 41
Labels Title Title of diagram x-Axis Label of x-axis y-Axis Label of y-axis Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 42
Fonts Font General font Individual fonts Individual fonts Diagram labels font of diagram labels Numbers font of numbers Legend font of legend Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 43
Options Display of spectra Display open files as single spectrum single overlay spectra superposed tile spectra tiled horizontally Display line cursor value Display line cursor no no display in legend value is displayed in legend at line cursor value is displayed at line cursor General: Standard values: The current options are saved as default values Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 44
7.6.6 User Setting Dialog for the configuration of the user mode setting. All menu commands are listed as in the menus. The selected commands are enabled in user mode, all others are disabled. Notice: Changing between administrator and user mode requires a password. The default password is "admin". If you don't remember your password copy the default administration file "admin" from the installation CD in the program folder.
7.6.7 Spectrometer Configuration Dialog for changing the spectrometer configuration.
7.6.
8 Specifications Technical Data PlasCalc-2000-UV/VIS/NIR Spectral range 200-1100 nm Optical resolution 1 nm FWHM (full width half maximum) Fiber-input-connector SMA905 D/A-converter 14 bit Analog output /voltage sign. 4 x [0-10V] Digital input/output 4 x TTL / 4 x TTL Interface USB V1.1 Power supply 12VDC 1,25A Operating temp.
9 End User License Agreement for Software (EULA) This End User License Agreement ("EULA") is a legal agreement between you (either an individual or a single entity) and Ocean Optis Germany GmbH ("Ocean Optics") for the Ocean Optics PlasCalc software, which includes computer software and may include associated media, printed materials, and "online" or electronic documentation ("SOFTWARE"). By installing, copying, or otherwise using the SOFTWARE, you agree to be bound by the terms of this EULA.
5. Limitation of Liability To the extent not prohibited by law, in no event will Ocean Optics or its licensors be liable for any lost revenue, profit or data, or for special, indirect, consequential, incidental or punitive damages, however caused regardless of the theory of liability, arising out of or related to the use of or inability to use SOFTWARE, even if Ocean Optics has been advised of the possibility of such damages.
10 Appendix A 10.1 Endpoint detection with the PlasCalc system General remarks In the following a step-by-step instruction is presented for setting up an endpoint detection recipe for the OCEAN OPTICS PlasCalc system. In the following it is assumed that you are familiar with the basic functions of the OCEAN OPTICS PlasCalc system. A. First time data acquisition While a typical process cycle is running, acquire spectra from the plasma.
From the recorded data select at least two spectra one before and one after the endpoint was reached. Carry out an identification of process relevant plasma particles using e.g. SpecLine software. Search especially for atomic lines and molecular bands of the process gas, of the layer material and of the substrate material. Compare the two spectra and look for new or vanished lines and difference in line intensities. C.
If a correlation of the monitor signals and the endpoint is not directly seen, you may improve your monitor recipe by following one or more of the steps given below: 1. Create monitor tracks which are related (divided) to the monitor signal of the background gas (preferable a noble gas) using the menu command Monitoring | Add combined monitor track: 2. 3. Create a monitor tracks which is Combining (dividing) monitor signals with different dependencies across the endpoint to improve the signal/noise ratio.
If it is not possible to run the process easily several times you may use the recorded spectra of the first run for defining the monitor tracks: When starting the PlasCalc software choose the option Open recorded sequence of spectra in the Start Options dialog: In the Open File dialog specify the first recorded spectra. The recorded sequence of spectra acts like a movie and will be played in the Record Window in an endless loop.
D. Defining set-points Once you have set-up your monitor tracks and you can see a increase or decrease in the signal while crossing the endpoint you may define set-points for automatic signaling if the endpoint is reached. In the Monitor Option dialog activate lower and/or upper set-point for the monitor tracks of interest: Specify how the crossing of a set-point is displayed on the screen and/or signaled by an acoustic sound.
The set-points are displayed in monitor window as dashed lines which can be moved using the mouse pointer.
