Owner manual
Operating Characteristics 3-15
3.3 Process States
The processing of material at the Equipment is depicted through two Finite State
Diagrams. The E10 diagram illustrates the state of the Equipment in relationship to
overall factory production. The GES Process State Diagram illustrates is greater
detail the processing at the GES-1993.
FMW implements a Process State Finite State Machine; GWGEM does NOT
provide such a service ([RefGWGEMUser] p. 169 ‘Process State Machine’).
See the Process State Diagram for a description of FMW processing state model.
FMW controls Process State machine changes in response to either operator or Host
command inputs. Change of Control State from Local to Remote or vice versa is
only allowed in the Idle Process State. This prevents loss of command
synchronization.
The Host may command Start, Stop, Pause, Resume, Local, Remote, and Abort. The
operator may command Start, Stop, Pause, Resume, Local, Remote, and Abort.
3.3.1 E10 State Diagram
The E10 state diagram is implemented in the GES-1993 according to the details
specified in the SEMI E10 document. The following summarizes the Equipment's
implementation of the E10 standard:
The GES-1993 can transition from any state to any other state except for
"Productive" The "Productive" state can only be entered from the "Standby" state.
Upon startup, the Equipment is in "Non-Scheduled Time”. The FMW SW does NOT
implement the E10 State Machine.
The following diagram and tables depict with greater detail the Equipment's use of
the E10 states.