User Manual

1-10 Introduction
1.8 SEMI E10 Standard
NOTE Fluidmove does not upload the E10 states through the SECS/GEM interface.
SEMI E10 provides a guideline for the definition and measurement of Equipment reliability, availability,
and maintainability (RAM). This document defines six basic Equipment States which define how
Equipment time is categorized.
A status bar on the Equipment reflects the current E10 state. These Equipment states are as defined in
SEMI E10-1992 (Section 3, ‘Equipment States’).