User Manual
Introduction 1-1
1 Introduction
1.1 Overview
This manual describes the SECS/GEM interface (version 4.8.3 or higher) used with Fluidmove for
Windows NT (FmNT) version 4.8.3 or higher, or Fluidmove for Windows XP (FmXP) version 5.0 or
higher. The term “Fluidmove” as used in this manual refers to the applicable software (FmNT or FmXP)
used on the Equipment.
This document is a modification of the GW Associates GES-1993 SECS/GEM Interface document and
has been especially prepared to support Fluidmove. The content and structure of this document follows
the original GES-1993 document. User information and GEM interface with Fluidmove were added.
Fluidmove supports the GW Associates GEM subset of the SECS communication standard. Future
references to the SECS/GEM interface will use only the GEM identification to acknowledge the specific
approach used by Fluidmove.
The interface between Fluidmove and a Host computer is explained in detail. The interface conforms to
the GEM standard. The GEM standard defines a standard implementation of the SECS-II communication
interface for all semiconductor manufacturing equipment.
GW Associates (Software Model GEM-NT-100) is used to implement approximately 90% of SECS and
GEM features, with Fluidmove implementing the remaining equipment-specific features.