Manual

iii

TABLE OF CONTENTS

1. Introduction................................................................... 1-1

1.1 SECS Standard .......................................................... 1-2

1.1.1 SECS-I Clarifications ............................................... 1-2

1.1.2 Physical Connection ................................................ 1-3

1.1.3 SECS-I Blocks Transmitted ..................................... 1-3

1.1.4 SECS-I Blocks Received ......................................... 1-4

1.1.5 Interleaved Blocks ................................................... 1-4

1.1.6 Simultaneous Transactions ..................................... 1-4

1.2 SECS-II Clarifications ................................................. 1-5

1.2.1 Data Format Types.................................................. 1-5

1.2.2 Data Item Length Bytes ........................................... 1-5

1.2.3 ASCII Data............................................................... 1-5

1.2.4 Multi-Block Messages.............................................. 1-5

1.2.5 Function Zero .......................................................... 1-6

1.3 GEM Standard............................................................ 1-7

1.4 GEM Compliance ....................................................... 1-7

1.5 SEMI E10 Standard.................................................... 1-9

1.6 SECS/GEM Configuration .......................................... 1-9

1.6.1 SECS-I Parameters ................................................. 1-10

1.6.2 SECS-II Parameters ................................................ 1-10

1.6.3 GEM Configuration .................................................. 1-10

1.7 Terminology................................................................ 1-13

1.8 State Diagrams........................................................... 1-13

1.9 Machine Operation and the GEM Interface ................ 1-15

1.9.1 Connecting to the Host ............................................ 1-15

1.9.2 Device Identification ................................................ 1-15

1.9.3 Clock........................................................................ 1-16

1.9.4 Loss of Communications Link: Spooling.................. 1-16

1.9.5 Communications Error Messages ........................... 1-16

1.9.6 Normal Communications ......................................... 1-16

1.9.6.1 Alarm Notification ................................................. 1-16

1.9.6.2 Remote Control Operations.................................. 1-17

1.9.6.3 Material Movement ............................................... 1-18

1.9.6.4 Terminal Message Notification ............................. 1-19

1.9.7 GEM Property Page ................................................ 1-19

1.9.7.1 Control Page......................................................... 1-19

1.9.7.2 Terminal Page ...................................................... 1-19

1.9.7.3 Setup Page........................................................... 1-19

1.9.8 RunWindow Interface .............................................. 1-20