Manual

Introduction 1-13
1.7 Terminology
The following terms are used throughout the document to refer to the various entities
interfacing with the GES-1993:
Table 1-6 Terminology
Equipment
The GES-1993.
Operator
The person who physically has access to the equipment's material port(s)
and control panel. This is the person who is operating the GES-1993.
Host
The computer which is connected to the equipment via the SECS interface
ALID
Equipment Alarm ID
CEID
Collection Event ID
DV
Data Variable
EC
Equipment Constants
FmNT
The Fluidmove for Windows NT software application which controls GEM.
GCD
GWGEM Configuration Data (an ASCII file compiled for GWGEM)
GEM
Generic Equipment Model.
ID
Identifier, or Identification
PP
Process Program
SECS
SEMI Equipment Communications Standard
SEMI
Semiconductor Equipment and Materials International
SV
Status Variable
SW
Software.
UFPP
UnFormatted Process Program
VID
Variable ID
1.8 State Diagrams
This document uses several Finite State Machine diagrams to describe the current
condition of the Equipment's SECS link, material handling mechanisms, and process
cycle. Each Finite State Machine diagram includes a State Diagram and a complete
description of the states and state transitions.
All Finite State Diagrams have been prepared in the format specified in the GEM
standard. This notation is required as a fundamental part of GEM compliance and
must be included in the Equipment SECS Interface Documentation. This notation is
the "Statechart" notation developed by David Harel.