Manual

1-2 Introduction
1.1 SECS Standard
The SEMI Equipment Communication Standard (SECS) is published by
Semiconductor Equipment and Materials International (SEMI). It defines a
computer to computer communications interface between a unit of factory
Equipment and a Host Computer.
This Equipment complies to the complete SECS-I standard (excluding the physical
RS-232 hardware connection) and to the generic portions of the SECS-II standard.
The equipment implements an appropriate subset of the SECS-II standard messages.
The GES-1993 complies to the following versions of standards:
 E4-1991 (SECS-I)
 E5-1993 (SECS-II)
GWGEM Software is used to meet the SECS standard.
SECS default parameters will be used wherever possible; differences will
be noted.
 NOTE There were no changes to the SEMI E4 standard for 1993.
1.1.1 SECS-I Clarifications
The Equipment was designed to avoid using any of the unusual features of the SECS
standard, so as to simplify the job of implementing Equipment support on the Host.
This section clarifies the Equipment/Host SECS interface.
FmNT supports only Ethernet High Speed SECS Message Services (HSMS) in
conjunction with communication drivers supplied by GW Associates. Presently,
FmNT does not support RS-232 interfaces.