Manual

Introduction 1-1

1. Introduction

This document describes the SECS interface provided on the GES-1993.

This document is a modification of the GW Associates GES-1993 SECS/GEM

Interface document. It has been especially prepared in support for Fluidmove for

Windows NT (FmNT). The content and structure of this document follows the

original [RefGWGEM] document. User information and GEM interface with FmNT

were added.

FmNT supports the GW Associates GEM subset of the SECS communication

standard. Future references to the SECS/GEM interface will use only the GEM

identification to acknowledge the specific approach used by FmNT.

This document has numerous references to other GW Associates documents. In order

to maintain clarity, these documents are referred to by the following notation:

 [RefGWGEM] GES-1993 SECS/GEM Interface document, GW Associates, Sep-

 [RefGWGEMUser ] GWGEM For Windows User’s Guide (including Version

3.10 Release Notes, Revision 1.0), GW Associates, Revision 2.2, Sep-94

 [ RefGWGEMRef] GWGEM For Windows Reference Manual, GW Associates,

Revision 2.0, Sep-94

 [ RefGWSECSUser ] SDR-TCP/IP For Windows User’s Guide, GW Associates,

Revision 1.0, Sep-95

The interface between FmNT and a host computer is explained in detail. The

interface conforms to the GEM standard [RefGWGEM]. The GEM standard defines

a standard implementation of the SECS-II communication interface for all

semiconductor manufacturing equipment.

System Requirements document for FmNT is also included. The majority of these

requirements will be fulfilled by FmNT. Other requirements (i.e. initializing ASCII

configuration text files) may be met using an Operator and written procedures.

GW Associates (Software Model GEM-W-100) is used to implement approximately

90% of SECS and GEM features, with the FmNT implementing the remaining

equipment-specific features. [RefGWGEMUser], [RefGWGEMRef], and

[RefGWSECSUser ] describe GEM-W-100 software.