Owner's manual

Table of Contents iii
Table of Contents
1 Introduction .................................................................................................................................... 1-1
1.1 Overview ................................................................................................................................ 1-1
1.2 Terminology ........................................................................................................................... 1-1
1.3 SECS/GEM Fluidmove Compatibility ................................................................................. 1-3
1.4 SECS Standard ..................................................................................................................... 1-3
1.4.1 SECS-I Clarifications ................................................................................................ 1-3
1.4.2 Physical Connection ................................................................................................. 1-4
1.4.3 SECS-I Blocks Transmitted ...................................................................................... 1-4
1.4.4 Interleaved Blocks .................................................................................................... 1-5
1.4.5 Simultaneous Transactions ...................................................................................... 1-5
1.5 SECS-II Clarifications ............................................................................................................ 1-5
1.5.1 Data Format Types ................................................................................................... 1-5
1.5.2 Data Item Length Bytes ............................................................................................ 1-5
1.5.3 ASCII Data................................................................................................................ 1-5
1.5.4 Multi-Block Messages .............................................................................................. 1-5
1.5.5 Function Zero ........................................................................................................... 1-6
1.6 GEM Standard ....................................................................................................................... 1-6
1.7 GEM Compliance .................................................................................................................. 1-6
1.8 SEMI E10 Standard ............................................................................................................... 1-8
1.9 SECS I / SECS II Parameters ............................................................................................... 1-8
1.9.1 SECS-I Parameters .................................................................................................. 1-8
1.9.2 SECS-II Parameters ................................................................................................. 1-8
1.9.3 GEM Configuration ................................................................................................... 1-9
1.10 State Diagrams .................................................................................................................... 1-10
1.11 Machine Operation and the GEM Interface ......................................................................... 1-11
1.11.1 Connecting to the Host ........................................................................................... 1-11
1.11.2 Device Identification ............................................................................................... 1-11
1.11.3 Clock ...................................................................................................................... 1-11
1.11.4 Loss of Communications Link: Spooling ................................................................ 1-12
1.11.5 Communications Error Messages .......................................................................... 1-12
1.11.6 Normal Communications ........................................................................................ 1-12
1.11.7 SECS/GEM Setup Dialog Box in Fluidmove .......................................................... 1-14
1.11.8 Fluidmove Run Window Interface .......................................................................... 1-19
2 Message Summary ........................................................................................................................ 2-1
2.1 Overview ................................................................................................................................ 2-1
2.2 Host-to-Equipment Messages ............................................................................................... 2-1
2.3 Equipment-to-Host Messages ............................................................................................... 2-3