Owner's manual

G-2 Glossary
HSMS-GS
High Speed Message Service-General Session. This standard defines TCP/IP
network communication used by GEM for Host/Equipment communication. It is
intended to be applied for complex systems containing multiple independently
accessible subsystems and uses an extended state machine.
HSMS-SS
High Speed Message Service-Single Session. This standard defines TCP/IP
network communication used by GEM for Host/Equipment communication. It
replaces the SECS-I standard.
ID
Identifier or Identification.
Operator
The person who physically has access to the Equipment’s material port(s) and
control panel. This is the person who is operating the dispensing system.
PP
Process Program
Recipe
A file containing a set of instructions for the Equipment.
Report
A set of variables predefined by the Equipment or defined by the Host. The Host
uses reports to gather status variable, data variable, and Equipment constant
values. The Host may request a report explicitly or attach a set of reports to a
collection event.
SECS
SEMI Equipment Communications Standard.
SECS I (E4):
SEMI Equipment Communications Standard 1 Message Transfer.
Defines RS-232 serial communication used by GEM for Host/Equipment
communication.
SECS II (E5):
SEMI Equipment Communications Standard 2 Message Content.
A standard for communications between intelligent Equipment and a Host. The
standard defines the communication protocol interface (SECS-I) and the
messages exchanged (SECS-II).
Message
All GEM Equipment and Host communication is accomplished using SECS-II
messages. Each unique SECS-II message is identified by its stream number (S)
and function number (F). The SECS-II standard defines a large set of SECS-II
messages determining each one's purpose, content, and usage. The GEM
standard defines how to use a subset of these SECS-II messages yet allows other
SECS-II messages to be used in addition to this subset.
SEMI
Semiconductor Equipment and Materials International (SEMI) is a global trade
association that represents the semiconductor and flat panel display equipment
and materials industries. SEMI maintains and publishes standards that relate to
Equipment automation and software.
Status Variable
(SV)
Status Variable. Status variables may include any parameters that can be
sampled in time such as temperature or quantity of a consumable. The Host may
gather status variable values from the GEM Equipment.
UFPP
Unformatted Process Program
VID
Variable Identifier. A unique string representing the name of a variable.