Owner's manual

1-8 Introduction
1.8 SEMI E10 Standard
NOTE Fluidmove does not upload the E10 states through the SECS/GEM interface.
SEMI E10 provides a guideline for the definition and measurement of Equipment reliability, availability,
and maintainability (RAM). This document defines six basic Equipment States which define how
Equipment time is categorized.
A status bar on the Equipment reflects the current E10 state. These Equipment states are as defined in
SEMI E10-1992 (Section 3, ‘Equipment States’).
1.9 SECS I / SECS II Parameters
1.9.1 SECS-I Parameters
This section provides hardware settings that apply only to the RS-232 hardware interface.
NOTE Fluidmove currently does not support this interface.
Table 1-4 SECS Installation Parameters
Parameter Default Description
Device ID 1 Specified as a value from 0 to 32767 (15 bits).
Baud Rate 9600
Allowable speeds are 110, 150, 300, 600, 1200, 2400, 4800, 9600,
and 19200 Baud.
T1 0.5 Sec
Inter-character Timeout. Range allowed is 0.1 to 10.0 seconds, at
increments of 0.1 seconds.
T2 10.0 Sec
Protocol Timeout. Range allowed is 0.2 to 25.0 seconds, at
increments of 0.1 seconds.
T3 45 Sec
Transaction Timeout. Range allowed is 1 to 120 seconds, at
increments of 1 second.
T4 45 Sec
Inter-Block Timeout. Range allowed is 1 to 120 seconds, at
increments of 1.
RTY 3
Transmit Failure Retry Limit. Range allowed is 0 to 31, at
increments of 1.
DUPLIC Off Duplicate Block Detect. May be Enabled (On) or Disabled (Off).
1.9.2 SECS-II Parameters
This section applies only to the Ethernet hardware interface defined in the SECS II standard.
There are no Operator adjustable parameters involved in configuring the SECS II interface.
The operating system of the Equipment computer must be made aware of the network
connection or the SECS/GEM feature will not operate.