Owner's manual
Introduction 1-3
Table 1-1 Definition of Terms (continued)
Term Definition
SEMI
Semiconductor Equipment and Materials International (SEMI) is a global trade
association that represents the semiconductor and flat panel display equipment and
materials industries. SEMI maintains and publishes standards that relate to Equipment
automation and software.
Status
Variable
(SV)
Status Variable. Status variables may include any parameters that can be sampled in
time such as temperature or quantity of a consumable. The Host may gather status
variable values from the GEM Equipment.
UFPP Unformatted Process Program
VID Variable Identifier. A unique string representing the name of a variable.
1.3 SECS/GEM – Fluidmove Compatibility
Compatibility between Fluidmove and SECS/GEM version is as follows:
• FmXP 5.3 requires SECS/GEM version 5.0.
• FmNT 4.9.3 requires SECS/GEM version 4.8.3.
1.4 SECS Standard
The SEMI Equipment Communication Standard (SECS) is published by Semiconductor Equipment and
Materials International (SEMI). It defines a computer to computer communications interface between a
unit of factory Equipment and a Host Computer.
This Equipment complies to the complete SECS-I standard (excluding the physical RS-232 hardware
connection) and to the generic portions of the SECS-II standard. The Equipment implements an
appropriate subset of the SECS-II standard messages and complies with the following versions of
standards:
• E4-1991 (SECS-I)
• E5-1993 (SECS-II)
NOTES There were no changes to the SEMI E4 standard for 1993.
GWGEM Software is used to meet the SECS standard.
SECS default parameters will be used wherever possible; differences will be noted.
1.4.1 SECS-I Clarifications
The Equipment was designed to avoid using any of the unusual features of the SECS standard, so as to
simplify the job of implementing Equipment support on the Host. This section clarifies the
Equipment/Host SECS interface.
Fluidmove supports only Ethernet High Speed SECS Message Services (HSMS) in conjunction with
communication drivers supplied by GW Associates.
Fluidmove does not support RS-232 interfaces.