Owner's manual

1-2 Introduction
Table 1-1 Definition of Terms (continued)
Term Definition
Fluidmove
The Fluidmove
®
for Windows XP
®
(FmXP) or Fluidmove
®
for Windows NT
®
(FmNT)
software application which controls GEM.
GCD GWGEM Configuration Data (an ASCII file compiled for GWGEM).
GEM
Generic Equipment Model. The GEM (E30) standard defines the generic behavior of
semiconductor Equipment as viewed through a communications link in terms of SECS-II
messages communicated over that link. The GEM standard impacts Equipment control
and Equipment-to-Host communications.
High-Speed
SECS
Message
Services
(HSMS)
HSMS (E37) is a high-speed replacement and an alternative to SECS-I for applications
where higher speed communication is needed or where simple point-to-point technology
is insufficient.
HSMS defines a communication interface via TCP/IP suitable for the exchange of
(SECS-II) messages between computers in a semiconductor factory.
Host
The computer which is connected to, and communicates with, the Equipment via the
SECS interface. The GEM standard defines a set of messages the Host must use when
interacting with the Equipment. The Equipment communicates with one Host, but the
Host may communicate with multiple Equipment units.
HSMS-GS
High Speed Message Service-General Session. This standard defines TCP/IP network
communication used by GEM for Host/Equipment communication. It is intended to be
applied for complex systems containing multiple independently accessible subsystems
and uses an extended state machine.
HSMS-SS
High Speed Message Service-Single Session. This standard defines TCP/IP network
communication used by GEM for Host/Equipment communication. It replaces the SECS-
I standard.
ID Identifier or Identification.
Operator
The person who physically has access to the Equipment’s material port(s) and control
panel. This is the person who is operating the dispensing system.
PP Process Program
Recipe A file containing a set of instructions for the Equipment.
Report
A set of variables predefined by the Equipment or defined by the Host. The Host uses
reports to gather status variable, data variable, and Equipment constant values. The
Host may request a report explicitly or attach a set of reports to a collection event.
SECS
SEMI Equipment Communications Standard.
SECS I (E4): SEMI Equipment Communications Standard 1 Message Transfer. Defines
RS-232 serial communication used by GEM for Host/Equipment communication.
SECS II (E5): SEMI Equipment Communications Standard 2 Message Content. A
standard for communications between intelligent Equipment and a Host. The standard
defines the communication protocol interface (SECS-I) and the messages exchanged
(SECS-II).
Message
All GEM Equipment and Host communication is accomplished using SECS-II messages.
Each unique SECS-II message is identified by its stream number (S) and function
number (F). The SECS-II standard defines a large set of SECS-II messages determining
each one's purpose, content, and usage. The GEM standard defines how to use a
subset of these SECS-II messages yet allows other SECS-II messages to be used in
addition to this subset.