Owner's manual

Introduction 1-1
1 Introduction
1.1 Overview
This manual describes the SECS/GEM interface used with Fluidmove for Windows XP (FmXP) version
5.3 and higher and Fluidmove for Windows NT (FmNT) version 4.93 and higher. The term “Fluidmove”
as used in this manual refers to the applicable software (FmXP or FmNT) used on the Equipment.
This document is a modification of the GW Associates GES-1993 SECS/GEM Interface document and
has been especially prepared to support Fluidmove. The content and structure of this document follows
the original GES-1993 document. User information and GEM interface with Fluidmove were added.
Fluidmove supports the GW Associates GEM subset of the SECS communication standard. Future
references to the SECS/GEM interface will use only the GEM identification to acknowledge the specific
approach used by Fluidmove.
The interface between Fluidmove and a Host computer is explained in detail. The interface conforms to
the GEM standard. The GEM standard defines a standard implementation of the SECS-II communication
interface for all semiconductor manufacturing equipment.
GW Associates (Software Model GEM-NT-100) is used to implement approximately 90% of SECS and
GEM features, with Fluidmove implementing the remaining equipment-specific features.
1.2 Terminology
Abbreviations and terms used in this manual are defined in Table 1-1.
Table 1-1 Definition of Terms
Term Definition
Alarm
An alarm is related to any abnormal situation on the Equipment. GEM allows the Host to
be notified when alarm conditions are detected and cleared.
ALID Equipment Alarm ID. The identifier for a specific alarm condition.
CEID Collection Event ID. The identifier for a specific collection event.
Collection
Event
A collection event is a detectable occurrence significant to the Equipment that is
considered to be significant to the Host. GEM allows the Host to be notified when a
collection event occurs. This allows the Host to track the Equipment's activity.
Data Values
Also known as Discrete Data. Meant to be temporary or ephemeral statuses that
disappear after an event is complete. Sometimes known as 'DVs' (Data Values),
'DVVALs' (Discrete Data Values).
Data
Variable
(DV)
Data variables may only be valid upon the occurrence of a particular collection event.
The Host may gather data variable values from the GEM Equipment.
Equipment
An intelligent system which communicates with a Host and complies with the GEM
standard. In this manual it refers to the dispensing system.
Equipment
Constant
(EC)
Equipment Constants are settable by the Host. The Host may gather Equipment
constant values from the GEM Equipment. The Host may also set Equipment constant
values on the GEM Equipment to control the Equipment's behavior.