Owner's manual

Table A-1 All Variables (Continued)
A-22 Appendix A - All Variables
Variable Name
Data Type
ID
SECS Type
Related
Collection
Events
Description
PromptedSetupScriptFilename DV 573 A[100]
4001
4002
4022
4023
Prompted setup script filename
NewParameterDouble DV 574 F8 8033 New parameter (double)
OldParameterDouble DV 575 F8 8033 Old parameter (double)
PurgeEnabled1 EC 600 Boolean None
This Boolean flag indicates whether periodic purging
operations are enabled for Valve 1.
MeasFlowEnabled1 EC 601 Boolean None
This Boolean flag indicates whether periodic flow rate
calibration operations are enabled for Valve 1.
PurgeEnabled2 EC 602 Boolean None
This Boolean flag indicates whether periodic purging
operations are enabled for Valve 2.
MeasFlowEnabled2 EC 603 Boolean None
This Boolean flag indicates whether periodic flow rate
calibration operations are enabled for Valve 2.
BoardFrequency EC 610 U4 None
This value is set by the station controller to the board
frequency it requires collection event 2010 to occur.
The default is zero which prevents collection event 2010
from triggering.
TemperatureDVUpdate EC 611 Boolean None
Set by the station controller to turn heater temperature
data variable updating on (TRUE) or off (FALSE). The
default value is TRUE.
FidLocTol EC 620 U2 None Fiducial location tolerance
DiagDistTol EC 621 U2 None Diagnostic distance tolerance (Vision – fiducials)
OperatorID EC 630 A[6] None Operator ID
WaferLotNumber EC 631 A[7] None Wafer lot number
WaferScribeNumber EC 632 A[20] None Wafer scribe number
RecipeSelectionStatus EC 633 I2 None Recipe selection status