Owner's manual

Table A-1 All Variables (Continued)
Appendix A - All Variables A-21
Variable Name
Data Type
ID
SECS Type
Related
Collection
Events
Description
HSAtScale2LidZ DV 531 F8 3734 Height sense at scale 2 lid Z position (user units)
TactileCenter DV 532 A[40] 3802 Tactile center (user units)
SSPinXY DV 533 A[40]
8005
8006
Service Station pin XY location
SSPinScore DV 534 I2 8005 Service Station pin fiducial score
XYDotOffsetXY DV 535 A[40]
8015
8016
8017
8018
8019
8020
8021
XY dot offset location
XYDotOffsetScore DV 536 I2
8015
8016
8017
8018
8019
8020
8021
XY dot offset fiducial score
WaferCount DV 550 U4 3632 Wafer count
WaferStatus DV 551 U4 3635 Wafer status
WaferSlotNumber DV 552 U4 3633 Wafer slot number
MultiFlowrates_V1 DV 560 F8[50] 4014 Multiple Flow Rates for valve 1
MultiFlowrates_V2 DV 561 F8[50] 4015 Multiple Flow Rates for valve 2
CarrierSeqAtDisp_L1 DV 571 I4
2001
2002
8404
Carrier sequence at dispense station lane 1
CarrierSeqAtDisp_L2 DV 572 I4
2003
2004
8406
Carrier sequence at dispense station lane 2