Owner's manual

Table of Tables xvii
Table 5-42 SECS Messages Host to Equipment, Multi-Line ............................................................ 5-16
Table 5-43 SECS Messages Equipment Sends Text to Host .......................................................... 5-16
Table 5-44 SECS Messages Unrecognized Device ID .................................................................... 5-17
Table 5-45 SECS Messages Unrecognized Stream ........................................................................ 5-17
Table 5-46 SECS Messages Unrecognized Function ...................................................................... 5-17
Table 5-47 SECS Messages Illegal Data Format ............................................................................. 5-18
Table 5-48 SECS Messages Data Too Long ................................................................................... 5-18
Table 5-49 SECS Messages Host Sets Date and Time ................................................................... 5-19
Table 5-50 SECS Messages Host Requests Date and Time ........................................................... 5-19
Table 5-51 SECS Messages Equipment Requests Date and Time ................................................. 5-19
Table 5-52 SECS Messages Host Enables Spooling of Messages ................................................. 5-20
Table 5-53 SECS Messages Spooled and Transmitted ................................................................... 5-21
Table 5-54 SECS Messages Host Purges Spool ............................................................................. 5-22
Table 6-1 Status Variables ............................................................................................................... 6-1
Table 6-2 Data Variables .................................................................................................................. 6-4
Table 6-3 Equipment Constants ....................................................................................................... 6-8
Table 7-1 Host-to-Equipment Messages .......................................................................................... 7-1
Table 8-1 Equipment-to-Host Messages .......................................................................................... 8-1
Table C-1 Alarms ............................................................................................................................. C-1
Table F.2-1 Setup Level Variables ...................................................................................................... F-4
Table F.3-1 Lot Level Variables ........................................................................................................... F-5
Table F.3-2 Lot Level Variables – Related Collection Events .............................................................. F-5
Table F.4-1 Carrier Level Variables ..................................................................................................... F-6
Table F.4-2 Carrier Level Variables – Related Collection Events ........................................................ F-8
Table F.5-1 Configuration Parameter Download Rejection Variables ................................................. F-9
Table F.5-2 Configuration Parameter Download Rejection Variables – Related Collection Events .... F-9
Table F.6-1 Configuration Change Notification - New Collection Events .......................................... F-10
Table F.6-2 Configuration Change Notification - New Data Variables .............................................. F-11
Table F.7-1 Recipe Change Notification – Related Report Variables ............................................... F-12