Owner's manual

Table of Tables xiii
Table of Tables
Table 1-1 Definition of Terms ........................................................................................................... 1-1
Table 1-2 RS-232 Pins ..................................................................................................................... 1-4
Table 1-3 GEM Compliance Statement ............................................................................................ 1-7
Table 1-4 SECS Installation Parameters .......................................................................................... 1-8
Table 1-5 GemRPType .................................................................................................................... 1-9
Table 1-6 Compatibility Settings ..................................................................................................... 1-10
Table 1-7 Remote Run Commands ............................................................................................... 1-13
Table 2-1 SECS Messages – Host-to-Equipment ............................................................................ 2-1
Table 2-2 Control State Values ........................................................................................................ 2-2
Table 2-3 SECS Messages – Equipment-to-Host ............................................................................ 2-3
Table 3-1 State Transitions .............................................................................................................. 3-2
Table 3-2 Communication State Values ........................................................................................... 3-3
Table 3-3 Related Variables ............................................................................................................. 3-4
Table 3-4 Control States................................................................................................................... 3-5
Table 3-5 Control State Transitions .................................................................................................. 3-7
Table 3-6 Control State Values ........................................................................................................ 3-8
Table 3-7 Control State Variables .................................................................................................... 3-9
Table 3-8 Control State CEIDS ........................................................................................................ 3-9
Table 3-9 E10 State Transitions ..................................................................................................... 3-11
Table 3-10 E10 State Values ............................................................................................................ 3-11
Table 3-11 Process State Transitions .............................................................................................. 3-13
Table 3-12 Equipment Process State Values ................................................................................... 3-14
Table 3-13 Equipment Processing Variables ................................................................................... 3-14
Table 3-14 Limits State Transitions .................................................................................................. 3-19
Table 3-15 Limits States ................................................................................................................... 3-19
Table 3-16 Data Collection / Setup Variables ................................................................................... 3-20
Table 3-17 Data Collection CEIDS ................................................................................................... 3-20