Manual

Table of Contents iii
TABLE OF CONTENTS
1 INTRODUCTION ...................................................................................................1-1
1.1 Overview....................................................................................................................1-1
1.2 Terminology...............................................................................................................1-2
1.3 SECS/GEM – Fluidmove Compatibility .....................................................................1-4
1.4 SECS Standard .........................................................................................................1-4
1.4.1 SECS-I Clarifications.................................................................................................1-4
1.4.2 Physical Connection..................................................................................................1-5
1.4.3 SECS-I Blocks Transmitted.......................................................................................1-5
1.4.4 Interleaved Blocks .....................................................................................................1-6
1.4.5 Simultaneous Transactions.......................................................................................1-6
1.5 SECS-II Clarifications................................................................................................1-7
1.5.1 Data Format Types....................................................................................................1-7
1.5.2 Data Item Length Bytes.............................................................................................1-7
1.5.3 ASCII Data.................................................................................................................1-7
1.5.4 Multi-Block Messages ...............................................................................................1-7
1.5.5 Function Zero ............................................................................................................1-7
1.6 GEM Standard...........................................................................................................1-8
1.7 GEM Compliance ......................................................................................................1-8
1.8 SEMI E10 Standard.................................................................................................1-10
1.9 SECS I / SECS II Parameters .................................................................................1-11
1.9.1 SECS-I Parameters.................................................................................................1-11
1.9.2 SECS-II Parameters................................................................................................1-11
1.9.3 GEM Configuration..................................................................................................1-12
1.10 State Diagrams........................................................................................................1-14
1.11 Machine Operation and the GEM Interface.............................................................1-15
1.11.1 Connecting to the Host............................................................................................1-15
1.11.2 Device Identification ................................................................................................1-15
1.11.3 Clock........................................................................................................................1-15
1.11.4 Loss of Communications Link: Spooling .................................................................1-16
1.11.5 Communications Error Messages ...........................................................................1-16
1.11.6 Normal Communications.........................................................................................1-16
1.11.7 SECS/GEM Setup Dialog Box in Fluidmove ...........................................................1-19
1.11.8 Fluidmove Run Window Interface ...........................................................................1-23
2 MESSAGE SUMMARY ......................................................................................... 2-1
2.1 Host-to-Equipment Messages ...................................................................................2-1