Manual

Introduction 1-1
1 Introduction
1.1 Overview
This manual describes the SECS/GEM interface used with Fluidmove for Windows NT (FmNT) version
4.8.4 or 4.8.5. The SECS/GEM driver version 4.8.3 is required. The term “Fluidmove” as used in this
manual refers to the applicable software (FmNT) used on the Equipment.
This document is a modification of the GW Associates GES-1993 SECS/GEM Interface document and
has been especially prepared to support Fluidmove. The content and structure of this document follows
the original GES-1993 document. User information and GEM interface with Fluidmove were added.
Fluidmove supports the GW Associates GEM subset of the SECS communication standard. Future
references to the SECS/GEM interface will use only the GEM identification to acknowledge the specific
approach used by Fluidmove.
The interface between Fluidmove and a Host computer is explained in detail. The interface conforms to
the GEM standard. The GEM standard defines a standard implementation of the SECS-II communication
interface for all semiconductor manufacturing equipment.
GW Associates (Software Model GEM-NT-100) is used to implement approximately 90% of SECS and
GEM features, with Fluidmove implementing the remaining equipment-specific features.