Owner's manual
Table Of Contents
- Title Page
- Table of Contents
- 1. Introduction
- 2. Message Summary
- 3. Operating Characteristics
- 4. SECS Message Detail
- 4.1 SML Notation
- 4.2 SECS Messages
- S1F1 - Are You There
- S1F2 - On Line Data (Equipment to Host)
- S1F2 - On Line Data (Host to Equipment)
- S1F3 - Selected Status Request
- S1F4 - Selected Status Data
- S1F11 - Status Variable Namelist Request
- S1F12 - Status Variable Namelist Reply
- S1F13 - Connect Request
- S1F14 - Connect Request Acknowledge
- S1F15 - Request Off-Line
- S1F16 - Off-Line Acknowledge
- S1F17 - Request On-Line
- S1F18 - On-Line Acknowledge
- S1F65 - Connect Request
- S1F66 - Connect Request Acknowledge
- S2F13 - Equipment Constant Request
- S2F14 - Equipment Constant Data
- S2F15 - New Equipment Constant Send
- S2F16 - Equipment Constant Send Acknowledge
- S2F17 - Date and Time Request
- S2F18 - Date and Time Data
- S2F23 - Trace Initialize Send
- S2F24 - Trace Initialize Acknowledge
- S2F25 - Diagnostic Loopback Request
- S2F26 - Diagnostic Loopback Data
- S2F27 - Initiate Process Request
- S2F28 - Initiate Process Acknowledge
- S2F29 - Equipment Constant Namelist Request
- S2F30 - Equipment Constant Namelist Reply
- S2F31 - Date and Time Send
- S2F32 - Date and Time Acknowledge
- S2F33 - Define Report
- S2F34 - Define Report Acknowledge
- S2F35 - Link Event Report
- S2F36 - Link Event Report Acknowledge
- S2F37 - Enable/Disable Event Report
- S2F38 - Enable/Disable Event Report Acknowledge
- S2F39 - Multi-Block Inquire
- S2F40 - Multi-Block Grant
- S2F41 - Remote Command with Parameters
- S2F42 - Remote Command Acknowledge
- S2F43 - Reset Spooling Streams and Functions
- S2F44 - Reset Spooling Acknowledge
- S2F45 - Define Variable Limits Attributes
- S2F46 - Variable Limit Attribute Acknowledge
- S2F47 - Variable Limit Attribute Request
- S2F48 - Variable Limit Attributes Send
- S5F1 - Alarm Report
- S5F2 - Alarm Acknowledge
- S5F3 - Enable/Disable Alarm Send
- S5F4 - Enable/Disable Alarm Acknowledge
- S5F5 - List Alarms Request
- S5F6 - List Alarm Data
- S5F7 - List Enabled Alarms Request
- S5F8 - List Enabled Alarm Data
- S5F71 - Alarm Report Block Send
- S5F72 - Alarm Report Block Acknowledge
- S5F73 - Alarm Report Block Acknowledge
- S5F74 - Alarm Notification Acknowledge
- S6F1 - Trace Data Send
- S6F2 - Trace Data Acknowledge
- S6F3 - Annotated Event Report
- S6F4 - Annotated Event Report Acknowledge
- S6F5 - Multi-Block Data Send Inquire
- S6F6 - Multi-Block Grant
- S6F9 - Event Report
- S6F10 - Event Report Acknowledge
- S6F11 - Event Report Send
- S6F12 - Event Report Acknowledge
- S6F13 - Annotated Event Report Send
- S6F14 - Annotated Event Report Acknowledge
- S6F15 - Event Report Request
- S6F16 - Event Report Data
- S6F17 - Annotated Event Report Request
- S6F18 - Annotated Event Report Data
- S6F19 - Request Report Request
- S6F20 - Request Report Data
- S6F21 - Request Annotated Report Request
- S6F22 - Request Annotated Report Data
- S6F23 - Request Spooled Data
- S6F24 - Request Spooled Data Acknowledge
- S7F1 - Process Program Load Inquire
- S7F2 - Process Program Load Grant
- S7F3 - Process Program Send
- S7F4 - Process Program Acknowledge
- S7F5 - Process Program Request
- S7F6 - Process Program Data
- S7F17 - Process Program Delete
- S7F18 - Process Program Delete Acknowledge
- S7F19 - Process Program Directory Request
- S7F20 - Process Program Directory
- S9F1 - Unrecognized Device ID
- S9F3 - Unrecognized Stream
- S9F5 - Unrecognized Function
- S9F7 Invalid Data
- S9F9 Transaction Timer Timeout
- S9F11 - Data Too Long
- S10F1 - Terminal Request
- S10F2 - Terminal Request Acknowledge
- S10F3 - Terminal Display, Single
- S10F4 - Terminal Display Single Acknowledge
- S10F5 - Terminal Display, Multiblock
- S10F6 - Terminal Display Multiblock Acknowledge
- S10F9 - Broadcast
- S10F10 - Broadcast Acknowledge
- 5. SECS Scenarios
- 5.1 Equipment Communications
- Equipment Establishes Communications
- Host Establishes Communications
- Simultaneous Establish Communications
- Losing Connection, Re-Connecting
- Heartbeat
- Host Initializes Event Reporting
- Equipment Reports Event
- Equipment Reports Annotated Event
- Host Initiates Trace
- Host Terminates Trace
- Host Requests Status
- Host Defines Limits
- Host Queries Defined Limits
- Host Requests Report by CEID
- Host Requests Annotated Report by CEID
- Host Requests Report by RPTID
- Host Requests Annotated Report by RPTID
- Are You There
- Host Reads Equipment Constants
- Host Sets Equipment Constants
- 5.2 Data Collection
- 5.3 Alarms
- 5.4 Control State
- 5.5 Process Program Management
- 5.6 Equipment Terminal Communications
- 5.7 SECS Error Messages
- 5.8 Clock
- 5.9 Spooling
- 5.1 Equipment Communications
- 6. Machine Variable Definitions
- 7. Host-to-Equipment Messages
- 8. Equipment-to-Host Messages
- Appendixes
- Glossary
Remote run commands are described in Table 1-7.
Table 1-7 Remote Run Commands
Command Description
START This command is successful when the Control State is OnLine - REMOTE , the board
is in the Dispensing position, the machine is configured for a run, and the process
program has been selected. This event begins the continuous processing of substrate
trays. Processing can be interrupted by STOP, PAUSE, and ABORT commands. The
Operator can also initiate PAUSE and STOP commands from the Run Window.
STOP This command is successful when the Control State is OnLine - REMOTE, and the
Process State is Running. It causes a halt in dispensing following completion of the
current substrate cycle. The Process State changes to IDLE when this command is
delivered and the process program is terminated. Further processing of the substrate
tray is not possible after completing this command.
PAUSE This command is successful when the Control State is OnLine - REMOTE and the
Process State is Running. It causes a halt in dispensing following completion of the
current instruction. The board and the process program are retained without change.
The Process State changes to PAUSED. Diagnostics and status checks may be
performed at this time. The substrate processing may be continued in the Running
State by delivering the RESUME command.
RESUME This command is successful when the Control State is OnLine - REMOTE, and the
Process State is PAUSED. Processing of the substrate tray continues exactly from the
PAUSED point and the current process program executes from the beginning of the
next unprocessed instruction.
LOCAL This command is successful if the current Control State is OnLine -REMOTE,
otherwise it is ignored. The Host may request local operation for an Operator to
perform maintenance or inspection of the machine. The Host may request a return to
operation under its command by delivering the REMOTE command.
REMOTE This command is successful if the current Control State is OnLine - LOCAL, the
Process State is IDLE and the configuration allows remote operation. Return to the
REMOTE state following an ALARM or ABORT command without proper Operator
inspection and delivery of a Proceed event may return the machine to the same error
state which initially caused the machine to leave the REMOTE state.
ABORT This command is successful if the current Control State is OnLine - REMOTE, the
Process State is Running, and the configuration allows remote operation. This
command indicates an error status which prevents further dispensing operation until
the error is corrected. Dispensing is immediately stopped and the current process
program is terminated. Operator intervention and maintenance is generally required in
order to resume operation past this point
1.11.6.3 Material Movement
FmNT declares two material movement events. The event notifications to the Host are: Dispensing and
DispensingDone.
Movement of the board into the ready position for dispensing invokes the Dispensing event. Transfer of
the board out of the ready position after dispensing invokes the DispensingDone event.
Equipment-to-Host Messages 1-17