Owner's manual

Glossary
Alarm
An alarm is related to any abnormal situation on the Equipment that may endanger
people, Equipment, or material being processed. GEM allows the Host to be notified
when alarm conditions are detected and cleared.
ALID
Equipment Alarm ID
CEID
Collection Event ID
Collection
Event
A collection event is a detectable occurrence significant to the Equipment that is
considered to be significant to the Host. GEM allows the Host to be notified when a
collection event occurs. This allows the Host to track the Equipment's activity.
Data
Variable
(DV)
Data variables may only be valid upon the occurrence of a particular event. The Host
may gather data variable values from the GEM Equipment.
Equipment
An intelligent system which communicates with a Host and complies with the GEM
standard. In this manual it refers to an Asymtek dispensing system.
Equipment
Constant
(EC)
Equipment Constants are settable by the Host. The Host may gather Equipment constant
values from the GEM Equipment. The Host may also set Equipment constant values on
the GEM Equipment to control the Equipment's behavior.
FmNT
The Fluidmove
®
for Windows NT
®
software application which controls GEM.
GCD
GWGEM Configuration Data (an ASCII file compiled for GWGEM).
GEM
Generic Equipment Model. The GEM (E30) standard defines the generic behavior of
semiconductor Equipment as viewed through a communications link in terms of SECS-
II messages communicated over that link. The GEM standard impacts Equipment
control and Equipment-to-Host communications.
High-Speed
SECS
Message
Services
(HSMS)
HSMS (E37) is a high-speed replacement and an alternative to SECS-I for applications
where higher speed communication is needed or where simple point-to-point
technology is insufficient.
HSMS defines a communication interface via TCP/IP suitable for the exchange of
(SECS-II) messages between computers in a semiconductor factory.
Host
The computer which is connected to, and communicates with, the Equipment via the
SECS interface. he GEM standard defines a set of messages the Host must use when
interacting with the Equipment. The Equipment communicates with one Host, but the
Host may communicate with multiple Equipment units.
HSMS-GS
High Speed Message Service-General Session. This standard defines TCP/IP network
communication used by GEM for Host/Equipment communication. It is intended to be
applied for complex systems containing multiple independently accessible subsystems
and uses an extended state machine.
Glossary G-1