Owner's manual

1.3 SECS/GEM – FmNT Compatibility
Compatibility between FmNT and SECS/GEM version is as follows:
• FmNT version 4.8 and earlier is compatible only with FmNT SECS/GEM, version 4.1.
• FmNT version 4.8.2 and later requires FmNT SECS/GEM, version 4.8.1 or later.
1.4 SECS Standard
The SEMI Equipment Communication Standard (SECS) is published by Semiconductor Equipment and
Materials International (SEMI). It defines a computer to computer communications interface between a
unit of factory Equipment and a Host Computer.
This Equipment complies to the complete SECS-I standard (excluding the physical RS-232 hardware
connection) and to the generic portions of the SECS-II standard. The Equipment implements an
appropriate subset of the SECS-II standard messages and complies with the following versions of
standards:
• E4-1991 (SECS-I)
• E5-1993 (SECS-II)
 NOTES There were no changes to the SEMI E4 standard for 1993.
GWGEM Software is used to meet the SECS standard.
SECS default parameters will be used wherever possible; differences will be noted.
1.4.1 SECS-I Clarifications
The Equipment was designed to avoid using any of the unusual features of the SECS standard, so as to
simplify the job of implementing Equipment support on the Host. This section clarifies the
Equipment/Host SECS interface.
FmNT supports only Ethernet High Speed SECS Message Services (HSMS) in conjunction with
communication drivers supplied by GW Associates.
FmNT does not support RS-232 interfaces.
1-4 Equipment-to-Host Messages