Owner's manual

Table Of Contents
A-4 Appendix A – Data Dictionary Values
Table A-1 Data Dictionary Variables (continued)
VID Class Format Name and Description
36 SV U1 PREVIOUSPROCESSSTATE. The Process State in effect before the
most recent transition to the current Process State.
0 = Idle (Boot-up)
1 = Idle
2 = Running
3 = Paused
4 = Aborting
5 = Error
37 SV U1 PROCESSSTATE. The current Process State.
0 = Idle (Boot-up)
1 = Idle
2 = Running
3 = Paused
4 = Aborting
5 = Error
38 SV A[6] SOFTREV. Software revision number with Major and minor parts.
Example: "1.02 " The revision is in M
ajor and minor format with a period
separating the parts.
39 SV A[12] TIME. The Equipment's current date and time in the following format:
YYMMDDHHMMSS.
YYYY = year from 0000 to 9999
MM = month from 01 to 12
DD = day from 01 to 31
hh = hours from 00 to 59
mm = minutes from 00 to 59
ss = seconds from 00 to 59
40 DV A[0..12] PPCHANGENAME. PPID of the Process Program most recently created,
changed, or deleted. This variable is the DOS 8.3 file name of the recipe
changed. It includes the extension RCP.
41 DV U1 PPCHANGESTATUS. The action (create, change, delete) taken on a
Process Program
1 = Created
2 = Changed
3 = Deleted
42 EC U1 OFFLINESUBSTATE. The default (power-up) offline substate of the
Control State Model.
1 = Equipment Off-Line
2 = Attempt On-Line
3 = Host Off-Line