Owner's manual

Table 1-1 Definition of Terms (continued)
Term Definition
HSMS-SS High Speed Message Service-Single Session. This standard defines TCP/IP network
communication used by GEM for Host/Equipment communication. It replaces the
SECS-I standard.
ID Identifier or Identification.
Operator The person who physically has access to the Equipment’s material port(s) and control
panel. This is the person who is operating the dispensing system.
PP Process Program
Recipe A file containing a set of instructions for the Equipment.
Report A set of variables predefined by the Equipment or defined by the Host. The Host uses
reports to gather status variable, data variable, and Equipment constant values. The
Host may request a report explicitly or attach a set of reports to a collection event.
SECS SEMI Equipment Communications Standard.
SECS I (E4): SEMI Equipment Communications Standard 1 Message Transfer.
Defines RS-232 serial communication used by GEM for Host/Equipment
communication.
SECS II (E5): SEMI Equipment Communications Standard 2 Message Content. A
standard for communications between intelligent Equipment and a Host. The standard
defines the communication protocol interface (SECS-I) and the messages exchanged
(SECS-II).
Message All GEM Equipment and Host communication is accomplished using SECS-II
messages. Each unique SECS-II message is identified by its stream number (S) and
function number (F). The SECS-II standard defines a large set of SECS-II messages
determining each one's purpose, content, and usage. The GEM standard defines how
to use a subset of these SECS-II messages yet allows other SECS-II messages to be
used in addition to this subset.
SEMI Semiconductor Equipment and Materials International (SEMI) is a global trade
association that represents the semiconductor and flat panel display equipment and
materials industries. SEMI maintains and publishes standards that relate to Equipment
automation and software.
Status
Variable
(SV)
Status Variable. Status variables may include any parameters that can be sampled in
time such as temperature or quantity of a consumable. The Host may gather status
variable values from the GEM Equipment.
UFPP Unformatted Process Program
VID Variable Identifier. A unique string representing the name of a variable.
Equipment-to-Host Messages 1-3