Owner's manual

4-40 System Configuration and Setup
4.3.10.5 E116 Equipment States
The SEMI E116 standard provides the provisional specifications for tracking performance of production
equipment. E116 is an essential component used in the E10 summation of equipment RAM. This feature
requires the SECS/GEM option to communicate the equipment states. Activating this feature enables the
host computer to track basic equipment performance.
To enable E116 Equipment States:
1. In the Main Window, select
Configuration > Setup Runtime Preferences >
E116 Equipment States
.
 The E116 Equipment States window opens (Figure 4-40).
2. Click on
Enable E116 Equipment States to activate this feature.
 A check mark in the box indicates this feature is active.
Figure 4-40 E116 Equipment States
4.3.10.5.1 Logging E116 State Changes
1. In the Main Window, select
Configuration > Setup Logging > Setup Event Logging.
2. In the "Category" portion of the Event Manager window, use the scroll bar to find the
desired category button and click on it. Refer to 4.3.7.1 Setup Event Logging for additional
information.
3. In the “Events: Configuration” portion of the window, click on one or all of the E116
events. See Figure 4-39 for a description.
 NOTE If you want to quickly enable all events, you can click on the Enable All button.
4. Click on
OK.