Owner's manual
I-2 Index
Dispensing Applications
Dam and Fill ............................................................... 1-2
Die Attach .................................................................. 1-2
Selective Flux.............................................................. 1-2
Solder Mask ............................................................... 1-2
Solder Paste ............................................................... 1-2
Surface Mount Technology ........................................ 1-2
Underfill ..................................................................... 1-2
Dispensing Applications (typical) ............................. 1-2–1-3
Dispensing Commands .................................................... 6-3
Dispensing Elements ....................................................... 6-4
arc .............................................................................. 6-5
area fill ....................................................................... 6-6
circle ........................................................................... 6-5
coat dot ...................................................................... 6-7
coat grid ..................................................................... 6-7
coat line ..................................................................... 6-7
Delta Z Line ................................................................ 6-6
dot .............................................................................. 6-5
dot grid ....................................................................... 6-7
find substrate height .................................................. 6-6
line ............................................................................. 6-5
multipass .................................................................... 6-7
pattern ....................................................................... 6-6
pot .............................................................................. 6-6
rectangle .................................................................... 6-5
select valve ................................................................. 6-6
spiral fill ...................................................................... 6-6
step and repeat ........................................................ 6-10
weight control fill ....................................................... 6-6
weight control line ..................................................... 6-6
Dispensing System
configuration ................................................. 4-55–4-115
Dot .................................................................................. 6-5
editing dot location .................................................. 6-45
editing style and weight ........................................... 6-46
programming ........................................................... 6-11
Dot Grid .......................................................................... 6-7
Dot Parameters .................................................... 6-20–6-27
advanced .................................................................. 6-24
during dispense ........................................................ 6-22
editing ............................................................. 6-25, 6-46
post dispense
........................................................... 6-23
pre-dispense ............................................................ 6-21
Dot Weight
calibration ................................................................ 6-38
parameters ...................................................... 5-18, 6-41
Down Acceleration ........................................................ 6-28
Dual Valves ................................................................... 4-57
Dynamic Dispense Control ................................... 7-60–7-63
E
E/P Regulators ................................................................ 1-5
E116 Equipment States ................................................. 4-40
Edit Window ................................................................. 3-21
command buttons .................................................... 3-23
lighting controls ....................................................... 3-23
target box ................................................................. 3-23
Electronic Pressure Control Utility ................................ 4-50
Equipment States ......... See SEMI E10/E58/E116 Equipment
States
Error Messages ................................................................ B-1
dispenser motor references not found ...................... 3-2
Exiting FmXP .................................................................... 3-2
F
Feature Access ................................................................ 4-7
Fiducial Assisted Setup ................................................ 4-122
Fiducials ....................................................... 5-26, 5-27–5-38
caliper tool ................................................................ 5-35
contrast .................................................................... 5-28
corner ....................................................................... 5-35
editing ....................................................................... 6-43
fiducial detection methods ....................................... 5-27
model fiducials ......................................................... 5-27
options ...................................................................... 7-13
reusing ...................................................................... 7-12
shape ........................................................................ 5-27
size ............................................................................ 5-28
teaching a corner fiducial ......................................... 5-36
teaching a model fiducial .......................................... 5-29
uniqueness ............................................................... 5-28
Filenames ........................................................................ 2-3
Find Substrate Height ...................................................... 6-6
Flow Rate
calibration ............................................... 5-17, 6-38, 6-42
measure flow rate command ................................... 6-41
parameters ...................................................... 5-15, 6-41
Flow Rate Calibration ...................................................... 1-4
Flowmeter Configuraton ............................................... 4-49
Fluid Files ......................................................... 1-4, 5-2, 5-12
Fluid Manager ............................................. 4-55, 5-12–5-24
attach script files ...................................................... 5-24
dot weight parameters ............................................. 5-18
flow rate parameters ................................................ 5-15
fluid name ................................................................. 5-12
low fluid software solution ......................................... 1-4
pot life/low fluid check ............................................. 5-22
purge parameters ..................................................... 5-13
weight verification .................................................... 5-20
FmConfig.ini ......................................................... 2-3, 4-115
FmConvey.ini ............................................................... 4-115
FmConvIO.ini ............................................................... 4-115
FmDispIO.ini ................................................................ 4-115
FmXP
error messages ........................................................... B-1
file structure ............................................................... 2-4
fluid files .............................................................. 5-1, 5-2
heater files .................................................................. 5-1
installation .................................................................. 2-1
main program ............................................................. 5-7
program structure ...................................................... 5-4
recipe ................................................................... 5-1, 5-2
standard filename conventions .................................. 2-3
starting and exiting ..................................................... 3-2
vision files ............................................................ 5-1, 5-2
workpiece pattern ...................................................... 5-8